Deposition of nitrides and oxides of aluminum and titanium by pulse laser irradiation

Journal of Materials Research volume 7, Article number: 72 (1992) Cite this article

Abstract

Deposits of nitrides and oxides of Al and Ti have been produced by laser irradiation of Al and Ti targets in air, N2, and NH3 + N2 gases. Microstructure and constituent phases in these deposits have been examined by scanning electron microscopy (SEM), transmission electron microscopy (TEM), and x-ray diffractometry (XRD). The distribution of metalloid elements has been investigated by Rutherford backscattering spectrometry (RBS). On the basis of the results of these examinations, the nitride and oxide deposits have been shown to be formed by reactions between ambient gas and metal-melt or metal-vapor which take place during pulse laser irradiation.

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References

  1. 1.

    Ν. Biunno, J. Narayan, S. K. Hofmeister, A. R. Srivatsa, and R. K. Singh, Appl. Phys. Lett. 54, 1519 (1989).

    CAS  Article  Google Scholar 

  2. 2.

    O. Auciello, T. Barnes, S. Chevacharoenkul, A. F. Schreiner, and G. E. McGuire, Thin Solid Films 181, 65 (1989).

    CAS  Article  Google Scholar 

  3. 3.

    N. N. Rykalin, A. A. Uglov, V. A. Grebennikov, and M. B. Ignat’ev, Sov. Phys. Dokl. 28, 895 (1983).

    Google Scholar 

  4. 4.

    Η-J. Scheive and R. Siemroth, IEEE Trans. Plasma Sci. 18, 917 (1990).

    Article  Google Scholar 

  5. 5.

    S. R. Nishitani, H. Yamaoka, and M. Yamaguchi, Jpn. J. Appl. Phys. 29, 2477 (1990).

    CAS  Article  Google Scholar 

  6. 6.

    S-W. Chan, D. Dijkkamp, X. D. Wu, T. Venkatesan, and C. C. Chang, in Beam-Solid Interactions and Transient Processes, edited by M. O. Thompson, S. T. Picraux, and J. S. Williams (Mater. Res. Soc. Symp. Proc. 74, Pittsburgh, PA, 1987), p. 287.

  7. 7.

    S. B. Ogale, A. Polman, F. O. P. Quentin, S. Roorda, and F. W. Saris, Appl. Phys. Lett. 50, 138 (1987).

    CAS  Article  Google Scholar 

  8. 8.

    A. Matsunawa and S. Katayama, Laser Welding, Machining and Materials Processing, Proceedings of the International Conference on Applications of Lasers and Electro-Optics–ICALEO ‘85, edited by C. Albright (Springer-Verlag, New York, 1986), p. 205.

  9. 9.

    I. Ursu, I. N. Mihailescu, L. C. Nistor, Al Popa, Μ. Popescu, V. S. Teodorescu, L. Nanu, A. M. Prokhorov, V. I. Konov, V. N. Tokarev, and S. A. Uglov, J. Phys. D 18, 1693 (1985).

    CAS  Google Scholar 

  10. 10.

    V. Craciun, G. Leggieri, A. Luches, Μ. Martino, I. N. Mihailescu, and I. Ursu, Appl. Surf. Sci. 43, 304 (1989).

    CAS  Article  Google Scholar 

  11. 11.

    Joint Committee of Powder Diffraction Spectra: TiN (osbornite), File No. 6–0642, and Ti (hexagonal), File No. 5–0682.

  12. 12.

    B. C. Lippens and J. H. deBoer, Acta Cryst. 17, 1312 (1964).

    CAS  Article  Google Scholar 

  13. 13.

    C. E. Wicks and F. E. Block, Thermodynamic Properties of 65 Elements—Their Oxides, Halides, Carbides and Nitrides, Bureau of Mines, U. S. Depart. of Interior, Bulletin 605 (1963).

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Affiliations

  1. Department of Metal Science and Technology, Kyoto University, Sakyo-ku, Kyoto, 606-01, Japan

    S. R. Nishitani, S. Yoshimura, H. Kawata & M. Yamaguchi

Authors
  1. S. R. Nishitani
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  2. S. Yoshimura
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  3. H. Kawata
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  4. M. Yamaguchi
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Correspondence to S. R. Nishitani.

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Nishitani, S.R., Yoshimura, S., Kawata, H. et al. Deposition of nitrides and oxides of aluminum and titanium by pulse laser irradiation. Journal of Materials Research 7, 72 (1992). https://doi.org/10.1557/JMR.1992.0725

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