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Absorption coefficient of β–SiC grown by chemical vapor deposition

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Abstract

The absorption coefficient of β–SiC is measured by the transmission technique. β–SiC films are grown on Si substrates by chemical vapor deposition using a buffer layer between β–SiC and the substrate. The absorption coefficient value ranges from 10 to 5.5 × 104 cm−1 in the energy range between 2.42 and 4.4 eV. The bandgap of β–SiC films investigated in this study ranges between 2.13 and 2.32 eV.

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References

  1. A. W. Blakers and Μ. Α. Green, Appl. Phys. Lett. 47, 818 (1985).

    Article  CAS  Google Scholar 

  2. A. Rohatgi and P. R. Choudhury, IEEE Trans. Elect. Dev. ED-31, 596 (1984).

    Article  Google Scholar 

  3. T. Sugii, T. Ito, Y. Furumura, Μ. Doki, F. Mieno, and M. Maeda, IEEE Trans. Elect. Dev. Lett. 9, 87 (1988).

    Article  CAS  Google Scholar 

  4. Τ. Sugii, Τ. Yamakazi, and T. Ito, IEEE Trans. Elect. Dev. ED-37, 2331 (1990).

    Article  CAS  Google Scholar 

  5. M. I. Chaudhry, R. J. McCluskey, and R. L. Wright, J. Cryst. Growth 113, 120 (1991).

    Article  CAS  Google Scholar 

  6. Α. Addamino and J. S. Sprague, Appl. Phys. Lett. 44, 525 (1984).

    Article  Google Scholar 

  7. Μ. David, S. V. Babu, M. I. Chaudhry, and B. K. Flint, Appl. Phys. Lett. 57, 1093 (1990).

    Article  CAS  Google Scholar 

  8. Μ. Ι. Chaudhry and R. L. Wright, J. Mater. Res. 5, 1595 (1990).

    Article  CAS  Google Scholar 

  9. J. I. Pankove, Optical Processes in Semiconductors (Prentice Hall, Englewood Cliffs, NJ, 1971), p. 103.

    Google Scholar 

  10. J. I. Pankove and P. Aigrain, Phys. Rev. 126, 956 (1962).

    Article  CAS  Google Scholar 

  11. L. Patrick and W. J. Choyke, Phys. Rev. 186, 775 (1969).

    Article  CAS  Google Scholar 

  12. S. Nishino, H. Matsunami, and T. Tanaka, Jpn. J. Appl. Phys. 14, 1833 (1975).

    Article  CAS  Google Scholar 

  13. J. W. Palmour, H. S. Kong, and R. F. Davis, Appl. Phys. Lett. 51, 2028 (1987).

    Article  CAS  Google Scholar 

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Solangi, A., Chaudhry, M.I. Absorption coefficient of β–SiC grown by chemical vapor deposition. Journal of Materials Research 7, 539–541 (1992). https://doi.org/10.1557/JMR.1992.0539

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  • DOI: https://doi.org/10.1557/JMR.1992.0539

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