Crystalline perfection of chemical vapor deposited diamond films


The crystalline perfection of microwave plasma assisted chemical vapor deposited (MPACVD) diamond films grown under various conditions has been examined by TEM. Most CVD diamond films thus far reported contain a high density of defects, predominantly twins and stacking faults on {111} planes. We show that under appropriate growth conditions, these planar defects are eliminated from the center of the crystallites, and occur only at grain boundaries where the growing crystallites meet.

This is a preview of subscription content, access via your institution.


  1. 1

    D. M. Busch, Properties of Diamond, edited by J. E. Field (Academic Press, London, 1979), Chap. 19.

  2. 2

    R. J. Caveney, Properties of Diamond, edited by J. E. Field (Academic Press, London, 1979), Chap. 20.

  3. 3

    A. T. Collins, Semiconductor Sci. Tech. 4, 605 (1989).

    CAS  Article  Google Scholar 

  4. 4

    J. F. Prins, Appl. Phys. Lett. 41, 950 (1982).

    CAS  Article  Google Scholar 

  5. 5

    M. W. Geis, N. N. Efremow, and D. D. Rathman, “Device Applications of Diamond”, Diamond and Diamond-like Materials Science and Engineering Study, edited by G. H. Johnson, M. Geis, and A. Badzian (Materials Research Society, Pittsburgh, PA, 1988).

  6. 6

    B. V. Derjaguin, B. V. Spitsyn, A. E. Gorodetsky, A. P. Zakharov, L. I. Bouilov, and A. E. Aleksenko, J. Cryst. Growth 31, 44 (1975).

    Article  Google Scholar 

  7. 7

    B. V. Derjaguin and B. V. Fedoseev, Growth of Diamond and Graphite from the Gas Phase (Izd. Nauka, Moscow, 1977), Chap. 4.

  8. 8

    H. Nakazawa, Y. Kanazawa, M. Kamo, and K. Osumi, Thin Solid Films 151 (2), 199 (1987).

    CAS  Article  Google Scholar 

  9. 9

    S. Matsumoto and Y. Matsui, J. Mater. Sci. 18, 1785 (1983).

    CAS  Article  Google Scholar 

  10. 10

    M. Kamo, Y. Sato, S. Matsumoto, and N. Setaka, J. Cryst. Growth 62, 642 (1985).

    Article  Google Scholar 

  11. 11

    K. Kobashi, K. Hishimura, Y. Kawate, and T. Horiuchi, J. Vac. Sci. Technol. A 6 (3), 1816 (1988).

    Article  Google Scholar 

  12. 12

    W. Zhu, A. R. Badzian, and R. Messier, J. Mater. Res. 4 (3), 659 (1989).

    CAS  Article  Google Scholar 

  13. 13

    B. E. Williams and J. T. Glass, J. Mater. Res. 4 (2), 373 (1989).

    CAS  Article  Google Scholar 

  14. 14

    C. J. H. Wort, A. H. Lettington, C. Smith, and A. V. Hetherington, SPIE Conf. Proc. (Orlando, FL, 1989).

  15. 15

    A. V. Hetherington, C. J. H. Wort, and P. D. Augustus, Institute Physics Conf. Series No. 98, 391 EMAG/MICRO 1989, edited by P. J. Goodhew and H. J. Elder (Institute of Physics, Bristol, 1989).

  16. 16

    J. C. Walmsley (private communication).

  17. 17

    L. M. Brown (private communication).

  18. 18

    K. E. Spear, J. Am. Ceram. Soc. 72 (2), 171 (1989).

    CAS  Article  Google Scholar 

  19. 19

    K. E. Spear and M. Frenklach, Mechanistic Hypotheses on Diamond Growth from the Vapour, SDI Office/Innovative Science and Technology-Office of Naval Research Diamond Technology Initiative Symposium, Crystal City, VA (July 1988).

  20. 20

    J. C. Angus and C. C. Hayman, Science (Washington, DC) 241, 913 (1989).

    Article  Google Scholar 

  21. 21

    T. Evans, Properties of Diamond, edited by J. E. Field (Academic Press, London, 1979), Chap. 13.

  22. 22

    M. Sokolowski and A. Sokolowska, J. Cryst. Growth 57, 185 (1982).

    CAS  Article  Google Scholar 

  23. 23

    P. K. Bachmann and R. Messier, Chem. and Eng. News 67 (20), 24 (1989).

    CAS  Article  Google Scholar 

Download references

Author information



Corresponding author

Correspondence to A. V. Hetherington.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Hetherington, A.V., Wort, C.J.H. & Southworth, P. Crystalline perfection of chemical vapor deposited diamond films. Journal of Materials Research 5, 1591–1594 (1990).

Download citation