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ATZelektronik

, Volume 8, Issue 2, pp 88–93 | Cite as

Galvanik in der Mikrosystemtechnik

  • Holger Vogt
  • Wolfgang Heiermann
  • Jennifer Hess
Titelthema Leistungselektronik
  • 104 Downloads

Literaturhinweise

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Copyright information

© Springer Fachmedien Wiesbaden 2013

Authors and Affiliations

  • Holger Vogt
    • 1
  • Wolfgang Heiermann
    • 2
  • Jennifer Hess
    • 2
  1. 1.Abteilung Elektrotechnik & InformationstechnikDuisburgGermany
  2. 2.Abteilung Technologie Forschung & Entwicklung (TFE)DuisburgGermany

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