Transfer bonding technology for batch fabrication of SMA microactuators
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Currently, the broad market introduction of shape memory alloy (SMA) microactuators and sensors is hampered by technological barriers, since batch fabrication methods common to electronics industry are not available. The present study intends to overcome these barriers by introducing a wafer scale transfer process that allows the selective transfer of heat-treated and micromachined shape memory alloy (SMA) film or foil microactuators to randomly selected receiving sites on a target substrate. The technology relies on a temporary adhesive bonding layer between SMA film/foil and an auxiliary substrate, which can be removed by laser ablation. The transfer technology was tested for microactuators of a cold-rolled NiTi foil of 20 μm thickness, which were heat-treated in free-standing condition, then micromachined on an auxiliary substrate of glass, and finally selectively transferred to different target substrates of a polymer. For demonstration, the new technology was used for batch-fabrication of SMA-actuated polymer microvalves.
KeywordsShape Memory Alloy European Physical Journal Special Topic Electrical Resistance Characteristic Glass Wafer Shape Memory Material
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- M. Kohl, B. Krevet, E. Just, Sensors Actuat. A 97-98, 646 (2002) Google Scholar
- M. Kohl, D. Brugger, M. Ohtsuka, T. Takagi, Sensors Actuat. 114, 445 (2004) Google Scholar
- M. Kohl, Y. Liu, D. Dittmann, Proc. MEMS '04, p. 288 Google Scholar
- R. Guerre, U. Drechsler, D. Jubin, M. Despont, CMOS-compatible Wafer-level Microdevice-distribution Technology, Proc. Transducers '07 (2007), p. 2087 Google Scholar
- R. Guerre, U. Drechsler, D. Jubin, M. Despont, Selective Transfer Technology for Microdevice Distribution, J. Microelectromech. Syst. (2007) (submitted) Google Scholar
- M. Kohl, Shape Memory Microactuators (Springer-Verlag, 2004) Google Scholar
- F. Niklaus, G. Stemme, J.-Q. Lu, R.J. Gutmann, J. Appl. Phys. 99, 031101 (2006) Google Scholar
- M. Kohl, Y. Liu, K. Okutsu, S. Miyazaki, A TiNiPd Thin Film Microvalve for High Temperature Applilcations, Mater. Sci. Eng. A 378 (Elsevier Verlag, 2004), p. S205 Google Scholar