The European Physical Journal D

, Volume 48, Issue 1, pp 87–94 | Cite as

Cross sections and transport properties of Cl- ions in noble gases

  • Z. Lj. Petrović
  • J. V. Jovanović
  • V. Stojanović
  • Z. M. Raspopović
  • Z. Ristivojević
Plasma Physics

Abstract.

We have used a simple semi-analytic — momentum transfer theory (MTT) to develop negative halogen ions/noble gases momentum transfer integral cross sections based on the available data for reduced mobility at 300 K as a function of E/N. The unfolded cross sections were validated or further improved by assuring a good agreement between our Monte Carlo (MC) calculated transport data and the available experimental results. The data are produced with an aim to provide plasma modellers with cross section data and transport coefficients. We have also calculated the net rates of elastic scattering and detachment.

PACS.

51.10.+y Kinetic and transport theory of gases 52.20.Hv Atomic, molecular, ion, and heavy-particle collisions 52.25.Fi Transport properties 

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References

  1. M.A. Lieberman, A.J. Lichtenberg, Principles of Plasma Discharge and Materials Processing (Wiley Hoboken, New Jersey, 2005) Google Scholar
  2. I. Stefanović, E. Kovacević, J. Berndt, J. Winter, New J. Phys. 5, 39.1 (2003); T. Makabe, Z. Petrović, Plasma Electronics: Applications in Microelectronic Device Fabrication Taylor and Francis (CRC Press, New York, 2006); J.P. Boeuf, Ph. Belenguer, J. Appl. Phys. 71, 4751 (1992) CrossRefADSGoogle Scholar
  3. D. Economou, Appl. Surf. Sci. 253, 6672 (2007) CrossRefADSGoogle Scholar
  4. N. Nakano, N. Shimura, Z.Lj. Petrović, T. Makabe, Phys. Rev. E 49, 4455 (1994); G.A. Curley, D. Marić, J.-P. Booth, C.S. Corr, P. Chabert, J. Guillon, Plasma Sources Sci. Technol. 16, S87 (2007); S.J. Choi, M.J. Kushner, J. Appl. Phys. 74, 853 (1993) CrossRefADSGoogle Scholar
  5. D. Pintassilgo, K. Kutasi, J. Loureiro, Plasma Sources Sci. Technol. 16, S115 (2007); R.E.J. Sladek, E. Stoffels, J. Phys. D: Appl. Phys. 38, 1716 (2005); N. Puac, Z.Lj. Petrović, G. Malović, A. Djordjević, S. Zivković, Z. Giba, D. Grubisić, J. Phys. D: Appl. Phys. 39, 3514 (2006) Google Scholar
  6. Y. Han, S. Xue, T. Wu, Z. Wu, W. Guo, Yi Luo, Z. Hao, C. Sun, J. Vac. Sci. Technol. A 22, 407 (2004); K.M. Chang, T.H. Yeh, I.C. Deng, H.C. Lin, J. Appl. Phys. 80, 3048 (1996) MATHCrossRefADSGoogle Scholar
  7. J. Matsui, N. Nakano, Z.Lj. Petrović, T. Makabe, Appl. Phys. Lett. 78, 883 (2001) CrossRefADSGoogle Scholar
  8. S. Samukava, K. Sakamoto, K. Ichiki, J. Vac. Sci. Technol. A 20, 1566 (2002); Z. Lj. Petrović, V.D. Stojanović, J. Vac. Sci. Tecnol. A 16, 329 (1998) CrossRefADSGoogle Scholar
  9. A.A. Buchachenko, R.V. Krems, M.M. Szczsniak, Y.-D. Xiao, L.A. Viehland, G. Chaasfski, J. Chem. Phys. 114, 9919 (2001) CrossRefADSGoogle Scholar
  10. H.W. Ellis, E.W. McDaniel, D.L. Albritton, L.A. Viehland, S.L. Lin, E.A. Mason, At. Data Nucl. Data Tab. 22, 179 (1978) CrossRefADSGoogle Scholar
  11. L.A. Viehland, E.A. Mason, At. Data Nucl. Data Tab. 60, 37 (1995) CrossRefADSGoogle Scholar
  12. L.A. Viehland, C.. Kirkpatrick, Chem. Phys. 202, 285 (1996) CrossRefADSGoogle Scholar
  13. E.J. Mansky, M.R. Flannery, J. Chem. Phys. 99, 1962 (1993) CrossRefADSGoogle Scholar
  14. A.D. Koutselos, E.A. Mason, L.A. Viehland, J. Chem. Phys. 93, 7125 (1990) CrossRefADSGoogle Scholar
  15. sassafrass.chatam.edu Google Scholar
  16. R.E. Robson, Introductory Transport Theory for Charged Particles in Gases (World Scientific Publishing, Singapore, 2006) Google Scholar
  17. M.G. Thackston, F.L. Eisele, W.M. Pope, H.W. Ellis, I.R. Gatland, E.W. McDaniel, J. Chem. Phys. 70, 3996 (1979) CrossRefADSGoogle Scholar
  18. M.G. Thackston, F.L. Eisele, W.M. Pope, H.W. Ellis, E.W. McDaniel, I.R. Gatland, J. Chem. Phys. 73, 3183 (1980) CrossRefADSGoogle Scholar
  19. S.B. Vrhovac, Z.Lj. Petrović, Phys. Rev. E 53, 4012 (1996); S.B. Vrhovac, Z.Lj. Petrović, L.A. Viehland, T.S. Santhanam, J. Chem. Phys. 110, 2423 (1999) CrossRefADSGoogle Scholar
  20. B.T. Smith, W.R. Edwards III, L.D. Doverspike, R.L. Champion, Phys. Rev. A 18, 945 (1978) CrossRefADSGoogle Scholar
  21. R.L. Champion, L.D. Doverspike, Phys. Rev. A 13, 609 (1976) CrossRefADSGoogle Scholar
  22. P. Langevin, Ann. Chim. Phys. 8, 245 (1905) Google Scholar
  23. E.A. Mason, E.W. McDaniel, Transport Properties of Ions in Gases (Wiley-Interscience Publication, New York, 1988) Google Scholar
  24. Z.Lj. Petrović, Z.M. Raspopović, V.D. Stojanović, J.V. Jovanović, G. Malović, T. Makabe, J. de Urquijo, Appl. Surf. Sci. 253, 6619 (2007) CrossRefADSGoogle Scholar
  25. F.L. Eisele, M.G. Thackston, W.M. Pope, H.W. Ellis, E.W. McDaniel, J. Chem. Phys. 70, 5918 (1979) CrossRefADSGoogle Scholar
  26. R.E. Robson, Aust. J. Phys. 47, 279 (1994) ADSGoogle Scholar
  27. R.E. Robson, J. Phys. B 9, L337 (1976) Google Scholar
  28. H.R. Skullerud, J. Phys. B 6, 728 (1973) CrossRefADSGoogle Scholar
  29. J.V. Jovanović, S.B. Vrhovac, Z.Lj. Petrović, Eur. Phys. J. D 21, (2002) 335-342 Google Scholar
  30. S. Rauf, M.J. Kushner, J. Appl. Phys. 82, 2805 (1997); T. Yagisawa, T. Shimada, T. Makabe, J. Vac. Sci. Technol. B 23, 2212 (2005) CrossRefADSGoogle Scholar
  31. R.D. White, K.F. Ness, R.E. Robson, Appl. Surf. Sci. 192, 26 (2002); R. Robson, Aust. J. Phys. 50, 577 (1991) CrossRefADSGoogle Scholar
  32. R.E. Robson, R.D. White, Z.Lj. Petrović, Rev. Mod. Phys. 77, 1303 (2005) CrossRefADSGoogle Scholar
  33. M. Tadokoro, H. Hirata, N. Nakano, Z.Lj. Petrović, T. Makabe, Phys. Rev. E 57, R43 (1998); A.V. Vasenkov, M.J. Kushner, J. Appl. Phys. 94, 5522 (2003) Google Scholar

Copyright information

© EDP Sciences/Società Italiana di Fisica/Springer-Verlag 2008

Authors and Affiliations

  • Z. Lj. Petrović
    • 1
  • J. V. Jovanović
    • 1
    • 2
  • V. Stojanović
    • 1
  • Z. M. Raspopović
    • 1
  • Z. Ristivojević
    • 1
  1. 1.Institute of PhysicsBelgradeSerbia
  2. 2.Faculty of Mechanical EngineeringBelgradeSerbia

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