Inorganic Materials: Applied Research

, Volume 2, Issue 2, pp 106–113 | Cite as

Analysis of mechanisms of dielectric target charging under the effect of electron irradiation

  • E. N. Evstaf’eva
  • E. I. Rau
  • V. N. Mileev
  • L. S. Novikov
  • S. A. Ditsman
  • R. A. Sennov
Materials of Aviation and Space Technology


The kinetics of charging of dielectric targets during their irradiation with electrons with energy of 2–30 keV are investigated both theoretically and experimentally. The dependences of equilibrium surface potentials and corresponding energies of primary electrons on the irradiation time at different current densities are obtained. The equilibrium parameters and characteristic times of charging are shown to differ substantially from the values calculated using a standard charging model of electron emission from an uncharged dielectric. The obtained experimental data are theoretically substantiated.


electron beam charging dielectric potential secondary emission 


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© Pleiades Publishing, Ltd. 2011

Authors and Affiliations

  • E. N. Evstaf’eva
    • 1
  • E. I. Rau
    • 1
  • V. N. Mileev
    • 2
  • L. S. Novikov
    • 2
  • S. A. Ditsman
    • 1
  • R. A. Sennov
    • 1
  1. 1.Institute of Microelectronics Technology and High Purity MaterialsRussian Academy of SciencesChernogolovka, Moscow oblastRussia
  2. 2.Skobeltsyn Institute of Nuclear PhysicsMoscow State UniversityMoscowRussia

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