Orientation and substructure of chemoepitaxial rutile films
The orientation and substructure of rutile films obtained by oxidation of oriented Ti films are investigated by transmission electron microscopy and high-energy electron diffraction. It is shown that the textures of the oxide are defined by the textures of the initial metal film. A set of orientation relations between the crystal lattices of titanium and rutile is established, and the optimal orientation relation is determined. The dislocation substructure of the high-angle 90° boundaries in TiO2 films is revealed. The size and orientation mismatch at this boundary is compensated by the grain boundary lattice dislocations.
Keywordstitanium oxidation titanium dioxide chemoepitaxy orientation substructure texture orientation relation
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