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Orientation and substructure of chemoepitaxial rutile films

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Inorganic Materials: Applied Research Aims and scope

Abstract

The orientation and substructure of rutile films obtained by oxidation of oriented Ti films are investigated by transmission electron microscopy and high-energy electron diffraction. It is shown that the textures of the oxide are defined by the textures of the initial metal film. A set of orientation relations between the crystal lattices of titanium and rutile is established, and the optimal orientation relation is determined. The dislocation substructure of the high-angle 90° boundaries in TiO2 films is revealed. The size and orientation mismatch at this boundary is compensated by the grain boundary lattice dislocations.

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Correspondence to V. M. Ievlev.

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Original Russian Text © V.M. Ievlev, K.A. Solntsev, A.A. Sinel’nikov, S.A. Soldatenko, 2011, published in Materialovedenie, 2010, No. 7, pp. 2–7.

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Ievlev, V.M., Solntsev, K.A., Sinel’nikov, A.A. et al. Orientation and substructure of chemoepitaxial rutile films. Inorg. Mater. Appl. Res. 2, 70–75 (2011). https://doi.org/10.1134/S2075113311010084

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  • DOI: https://doi.org/10.1134/S2075113311010084

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