Abstract
Difficulties that emerge in the development of micromechanical inertial sensors operating in self-oscillation mode are considered. Possible ways of how to analyze parameters of such sensors based on the analysis of information and energy characteristics are shown. The feasibility of micromechanical sensors using modern electronic elements, such as optoelectronic position sensors and magnetoelectric force-balance transducers, is discussed. The advantages of such devices are described.
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Published in Giroskopiya i Navigatsiya, 2014, No. 3, pp. 73–83.
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Skalon, A.I. Micromechanical inertial sensors on self-oscillating systems: Estimation of performance. Gyroscopy Navig. 6, 54–60 (2015). https://doi.org/10.1134/S2075108715010125
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DOI: https://doi.org/10.1134/S2075108715010125