Analysis features of elemental composition of boron carbonitride films by EDS
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Features of the analysis of elemental composition of thin boron carbonitride films by energy dispersive X-ray spectroscopy are discussed. The films are also studied by IR spectroscopy and scanning electron microscopy in order to obtain data on their elemental composition, types of chemical bonds, and surface morphology. The effect of film thickness and electron beam energy on the results of energy dispersive X-ray spectroscopy is also investigated.
KeywordsElemental Composition Energy Dispersive Spectroscopy Electron Beam Energy TEAB Wavelength Dispersive Spectroscopy
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