Analysis features of elemental composition of boron carbonitride films by EDS

  • V. S. Sulyaeva
  • E. A. Maksimovskii
  • M. L. Kosinova
  • Yu. M. Rumyantsev
Investigation Methods for Physicochemical Systems


Features of the analysis of elemental composition of thin boron carbonitride films by energy dispersive X-ray spectroscopy are discussed. The films are also studied by IR spectroscopy and scanning electron microscopy in order to obtain data on their elemental composition, types of chemical bonds, and surface morphology. The effect of film thickness and electron beam energy on the results of energy dispersive X-ray spectroscopy is also investigated.


Elemental Composition Energy Dispersive Spectroscopy Electron Beam Energy TEAB Wavelength Dispersive Spectroscopy 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    Tsai, P.-Ch., Surf. Coat. Technol., 2007, vol. 201, p. 5108.CrossRefGoogle Scholar
  2. 2.
    Kesler, V.G., Kosinova, M.L., Rumyantsev, Yu.M., et al., J. Struct. Chem., 2012, vol. 53, no. 4, p. 699.CrossRefGoogle Scholar
  3. 3.
    Sun, J., Feng, H., and Gan, J., Diamond Relat. Mater., 2012, vol. 21, p. 66.CrossRefGoogle Scholar
  4. 4.
    Suzuki, S. and Hibino, H., Mater. Sci. Eng., vol. 177, p. 233.Google Scholar
  5. 5.
    Jia, F., Zhuang, Ch., and Guan, Ch., Vacuum, 2011, vol. 85, p. 887.CrossRefGoogle Scholar
  6. 6.
    Qin, L., Yu, J., Kuang, Sh., et al., Nanoscale, 2012, vol. 4, p. 120.CrossRefGoogle Scholar
  7. 7.
    Wu, F., Valle, N., Fitzpatrick, R., et al., Surf. Interface Anal., 2011, vol. 43, p. 669.CrossRefGoogle Scholar
  8. 8.
    Krause, M., Bedel, L., Taupeau, A., et al., Thin Solid Films, 2009, vol. 518, p. 77.CrossRefGoogle Scholar
  9. 9.
    Lü, J., Li, H., Zhu, P., et al., Appl. Surf. Sci., 2011, vol. 257, p. 4963.CrossRefGoogle Scholar
  10. 10.
    Sulyaeva, V.S., Kosinova, M.L., Rumyantsev, Yu.M., et al., Inorg. Mater., 2010, vol. 46, p. 487.CrossRefGoogle Scholar
  11. 11.
    Rumyantsev, Yu.M., Fainer, N.I., Maksimovskii, E.A., et al., J. Struct. Chem., 2010, vol. 51,Suppl., p. 179.CrossRefGoogle Scholar
  12. 12.
    Mannan, M.A., Baba, Y., Kida, T., et al., Thin Solid Films, 2011, vol. 519, p. 1780.CrossRefGoogle Scholar
  13. 13.
    Bi, K., Liu, J., and Dai, Q., Appl. Surf. Sci., 2012, vol. 258, p. 4581.CrossRefGoogle Scholar
  14. 14.
    Kosinova, M.L., Fainer, N.I., Rumyantsev, Yu.M., et al., J. Phys. IV, 1999, vol. 9, p. 8.Google Scholar

Copyright information

© Pleiades Publishing, Ltd. 2014

Authors and Affiliations

  • V. S. Sulyaeva
    • 1
  • E. A. Maksimovskii
    • 1
  • M. L. Kosinova
    • 1
  • Yu. M. Rumyantsev
    • 1
  1. 1.Nikolaev Institute of Inorganic Chemistry, Siberian BranchRussian Academy of SciencesNovosibirskRussia

Personalised recommendations