Skip to main content
SpringerLink
Log in

Catalytic Activity of Amberlyst A-21 in the Disproportionation of Trichlorosilane at Critical Temperatures

  • GENERAL PROBLEMS OF CATALYSIS
  • Published:
Catalysis in Industry Aims and scope Submit manuscript

Abstract

The catalytic properties of Amberlyst A-21 anion-exchange resin in the gas-phase disproportionation reaction of trichlorosilane (TCS) at temperatures (up to 423 K) critical for the resin are investigated for the first time. It is established using thermal desorprtion followed by pyrolysis that Amberlyst A-21 undergoes thermal destruction to form chloromethane and the spherical polymer matrix decomposes at above 423 K. In the temperature range of 333–423 K, the apparent activation energy of disproportionation of TCS with using Amberlyst A-21 is 37.12 kJ/mol and the reaction rate constant is 0.80 s−1 (at 423 K). Three months of testing of the resin in disproportionation of TCS at 423 K demonstrates its stable catalytic activity.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1.
Fig. 2.
Fig. 3.
Fig. 4.
Fig. 5.
Fig. 6.

Similar content being viewed by others

REFERENCES

  1. Ahn, S.H., Chun, D.M., and Chu, W.S., Int. J. Precis. Eng. Manuf., 2013, vol. 14, no. 6, pp. 873–874.

    Article  Google Scholar 

  2. Shah, A.V., Meier, J., Vallat-Sauvain, E., Wyrsch, N., Kroll, U., Droz, C., and Graf, U., Sol. Energy Mater. Sol. Cells, 2003, vol. 78, nos. 1–4, pp. 469–491.

  3. Handbook of Semiconductor Manufacturing Technology, Nishi, Y. and Doering, R., Eds., Boca Raton, FL: CRC Press, 2007.

    Google Scholar 

  4. Eaglesham, D.J. and Cerullo, M., Phys. Rev. Lett., 1990, vol. 64, no. 16, pp. 1943–1947.

    Article  CAS  PubMed  Google Scholar 

  5. Chu, S. and Majumdar, A., Nature, 2012, vol. 488, no. 7411, pp. 294–303.

    Article  CAS  PubMed  Google Scholar 

  6. Bathey, B.R. and Cretella, M.C., J. Mater. Sci., 2005, vol. 17, no. 11, pp. 3877–3896.

    Google Scholar 

  7. Handbook of Semiconductor Silicon Technology, O’Mara, W.C., Herring, R.B., and Hunt, L.P., Eds., New Jersey: Noyes Publications, 1990.

    Google Scholar 

  8. Green, M.A., Sol. Energy, 2004, vol. 76, nos. 1–3, pp. 3–8.

  9. Duchemin, M.J.-P., Bonnet, M.M. and Koelsch, M.F., J. Electrochem. Soc., 1978, vol. 125, no. 4, pp. 637–644.

    Article  CAS  Google Scholar 

  10. Handbook of Photovoltaic Science and Engineering, Luque, A. and Hegedus, S., Eds., New York: Wiley, 2011.

    Google Scholar 

  11. US Patent 3963838, 1976.

  12. Iya, S.K., Flagella, R.N., and Dipaolo, F.S., J. Electrochem. Soc., 1982, vol. 129, pp. 1531–1535.

    Article  CAS  Google Scholar 

  13. WO Patent 1996/041036, 1997.

  14. Yasuda, K. and Okabe, T.H., J. Jpn. Inst. Met., 2010, vol. 74, pp. 1–9.

    Article  CAS  Google Scholar 

  15. Hou, Y.Q., Xie, G., Nie, Z.F., and Li, N., Adv. Mater. Res., 2014, vols. 881–883, pp. 1805–1808.

  16. Liu, S.-S., and Xiao, W.-D., Chem. Eng. Sci., 2015, vol. 127, pp. 84–94.

    Article  CAS  Google Scholar 

  17. Union Carbide Corporation Final Report, Springfield, VA: National Technical Information Center, 1981, DOE/JPL contract no. 954334.

  18. RF Patent 2152902, 2000.

  19. Mehler, M., Electron. News., 1984, vol. 30, no. 1485, p. 54.

    Google Scholar 

  20. Iya, J., J. Cryst. Growth, 1986, vol. 75, no. 1, pp. 88–90.

    Article  CAS  Google Scholar 

  21. Vorotyntsev, V.M., Mochalov, G.M., and Nipruk, O.V., Russ. J. Appl. Chem., 2001, vol. 74, no. 4, pp. 621–625.

    Article  CAS  Google Scholar 

  22. US Patent 4 704 264, 1987.

  23. US Patent 4 667 048, 1987.

  24. US Patent 4 395 389, 2017.

  25. Vorotyntsev, A.V., Zelentsov, S.V., and Vorotyntsev, V.M., Russ. Chem. Bull., 2011, vol. 60, no. 8, pp. 1531–1536.

    Article  CAS  Google Scholar 

  26. Vorotyntsev, A.V., Mochalov, G.M., and Vorotyntsev, V.M., Inorg. Mater., 2013, vol. 48, no. 1, pp. 1–5.

    Article  CAS  Google Scholar 

  27. Vorotyntsev, A.V., Petukhov, A.N., Vorotyntsev, I.V., Sazanova, T.S., Trubyanov, M.M., Kopersak, I.Y., Razov, E.N., and Vorotyntsev, V.M., Appl. Catal., B, 2016, vol. 198, pp. 334–346.

    Article  CAS  Google Scholar 

  28. Rossi, J.A., Willardson, R.K., Weber, E.R., and Rode, D.L., in Silicon Epitaxy, Semiconductors and Semimetals, San Diego, CA: Academic Press, 2001.

    Google Scholar 

  29. Lynch, D., Ben, W., and Ji, X., in 140th Annual Meeting and Exhibition, vol. 1: Materials Processing and Energy Materials, New York: Wiley, 2011, pp. 685–692.

  30. Kornev, R.A., Vorotyntsev, V.M., Petukhov, A.N., Razov, E.N., Mochalov, L.A., Trubyanov, M.M., and Vorotyntsev, A.V., RSC Adv., 2016, vol. 6, no. 102, pp. 99816–99824.

    Article  CAS  Google Scholar 

  31. Mansfeld, D.A., Vodopyanov, A.V., Golubev, S.V., Sennikov, P.G., Mochalov, L.A., Andreev, B.A., Drozdov, Yu.N., Drozdov, M.N., Shashkin, V.I., Bulkin, P., and Roca i Cabarrocas, P., Thin Solid Films, 2014, vol. 562, pp. 114–117.

    Article  CAS  Google Scholar 

  32. Bruno, G., Capezzuto, P., Cicala, G., and Cramarossa, F., Plasma Chem. Plasma Process., 1986, vol. 6, no. 2, pp. 109–125.

    Article  CAS  Google Scholar 

  33. Platz, R. and Wagner, S., Appl. Phys. Lett., 1998, vol. 73, pp. 1236–1238.

    Article  CAS  Google Scholar 

  34. Mochalov, L.A., Kornev, R.A., Nezhdanov, A.V., Mashin, A.I., Lobanov, A.S., Kostrov, A.V., Vorotyntsev, V.M., and Vorotyntsev, A.V., Plasma Chem. Plasma Process., 2016, vol. 36, no. 3, pp. 849–856.

    Article  CAS  Google Scholar 

  35. US Patent 2627451, 1956.

  36. Vorotyntsev, A.V., Zelentsov, S.V., Vorotyntsev, V.M., Petukhov, A.N., and Kadomtseva, A.V., Russ. Chem. Bull., 2015, vol. 64, no. 4, pp. 759–765.

    Article  CAS  Google Scholar 

  37. US Patent 2 732 280, 1956.

  38. US Patent 2 834 648, 1958.

  39. US Patent 4 605 543, 1986.

  40. Zagorodni, A.A., Ion Exchange Materials: Properties and Applications, Amsterdam: Elsevier, 2007.

    Book  Google Scholar 

  41. US Patent 3 968 199, 1976.

  42. US Patent 4 340 574, 1982.

  43. US Patent 4 613 489, 1986.

  44. US Patent 4 548 917, 1985.

  45. DE Patent 2 162 537, 1972.

  46. Huang, X., Ding, W.-J., Yan, J.-M., and Xia, W.-D., Ind. Eng. Chem. Res., 2013, vol. 52, no. 18, pp. 6211–6220.

    Article  CAS  Google Scholar 

  47. Alcántara-Avila, J.R., Sillas-Delgado, H.A., Segovia-Hernández, J.G., Gómez-Castro, F.I., and Cervantes-Jauregui, J.A., Comput. Chem. Eng., 2015, vol. 78, pp. 85–93.

    Article  CAS  Google Scholar 

  48. Devyatykh, G.G., Panov, G.I., and Kharitonov, A.S., J. Inorg. Chem., 1987, vol. 32, no. 4, pp. 1002–1005.

    CAS  Google Scholar 

  49. Vorotyntsev, V.M., Balabanov, V.V., and Shamrakov, D.A., High-Purity Subst., 1987, vol. 3, pp. 74–78.

    Google Scholar 

  50. Grishnova, N.D., Gusev, A.V., Moiseev, A.N., Mochalov, G.M., Balanovskii, N.V., and Kharina, T.P., Russ. J. Appl. Chem., 1999, vol. 72, no. 10, pp. 1761–1766.

    Google Scholar 

  51. Vorotyntsev, A.V., Petukhov, A.N., Makarov, D.A., Razov, E.N., Vorotyntsev, I.V., Nyuchev, A.V., Kirillova, N.I., and Vorotyntsev, V.M., Appl. Catal., B, 2018, vol. 224, pp. 621–633.

    Article  CAS  Google Scholar 

Download references

ACKNOWLEDGMENTS

This work was supported by Russian Foundation for Basic Research, project no. 16-38-60192 mol_a_dk. The samples were characterized with the support of the RF Ministry of Education and Science as part of a State Task, project no. 11/17-01.10.

Author information

Authors and Affiliations

  1. Alekseev Nizhny Novgorod State Technical University, 603155, Nizhny Novgorod, Russia

    A. V. Vorotyntsev, A. N. Petukhov, D. A. Makarov & V. M. Vorotyntsev

  2. Institute of Machine Building Problems, Russian Academy of Sciences, 603024, Nizhny Novgorod, Russia

    E. N. Razov

Authors
  1. A. V. Vorotyntsev
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. N. Petukhov
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. E. N. Razov
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. D. A. Makarov
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. V. M. Vorotyntsev
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to V. M. Vorotyntsev.

Additional information

Translated by O. Kadkin

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Vorotyntsev, A.V., Petukhov, A.N., Razov, E.N. et al. Catalytic Activity of Amberlyst A-21 in the Disproportionation of Trichlorosilane at Critical Temperatures. Catal. Ind. 10, 263–269 (2018). https://doi.org/10.1134/S2070050418040141

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S2070050418040141

Keywords:

Search

Navigation