Abstract
The influence of ion energy on the magnitude of internal stress, electric conductivity, and surface morphology of nitrogenated carbon coatings on silicon produced by the pulsed vacuum-arc technique has been studied by scanning electron microscopy and scanning probe microscopy. It has been found that an increase in the ion energy with variation in applied acceleration voltage substantially increases the internal compression stress in the forming coating. The ion irradiation results (1) in a considerable inhomogeneity of the internal stress distribution over the coating and (2) in the formation of 15-to 50-nm-high nanoscale islands. Inhomogeneity of the coating conductivity with a minimum on the peaks of the islands has been observed, which indicates the prevalence of tetrahedral bonds between carbon atoms in these regions with sp3 hybridization of atomic electron orbitals (sp3 phases). An explanation of the results has been proposed based on the existing model of the formation of internal stress in coatings prepared under ion irradiation.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Y. Lifshitz, “Diamond-Like—Present Status,” Diamond Relat. Mater. 8, 1659–1676 (1999).
J. Robertson, “Diamond-Like Amorphous Carbon,” Mater. Sci. Eng., R 37, 129–281 (2002).
H. Hofsäss, H. Feldermann, R. Merk, et al., “Cylindrical Spike Model for Formation of Diamond-Like Thin Films by Ion Deposition,” Appl. Phys. A: Mater. Sci. Process. 66, 153–181 (1998).
I. A. Karpovich, “GaAs-Based Quantum-Well Heteronanostructures,” in Proceedings of the First Workshop “NATO SfP-973779 Semiconductors,” Nizhni Novgorod, Russia, 2001 (Nizhni Novgorod, 2001), pp. 48–62.
A. I. Maslov, G. K. Dmitriev, and Yu. D. Chistyakov, “Pulsed Carbon-Plasma Source for Production Processes,” Prib. Tekh. Eksp., No. 3, 146–149 (1985) [Instrum. Exp. Tech. 28 (3), 662 (1985)].
Handbook of Thin Film Technology, Ed. by L. Maissel and R. Glang (McGraw-Hill, New York, 1970; Sovetskoe Radio, Moscow, 1977), Vol. 2.
T. Klotzbücher and E. W. Kreutz, “Extended Model for Stress-Induced Formation of c-BN in Ion-Assisted Deposition,” Diamond Relat. Mater. 7, 1219–1226 (1998).
J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © A.Ya. Kolpakov, M.E. Galkina, I.Yu. Goncharov, I.V. Sudzhanskaya, A.I. Poplavskii, 2008, published in Rossiiskie nanotekhnologii, 2008, Vol. 3, Nos. 9–10.
Rights and permissions
About this article
Cite this article
Kolpakov, A.Y., Galkina, M.E., Goncharov, I.Y. et al. Effect of internal stress on the surface morphology of hard nanoscale carbon coatings. Nanotechnol Russia 3, 581–586 (2008). https://doi.org/10.1134/S1995078008090073
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1995078008090073