Hydrogenated silicon oxycarbonitride films. Part II. Physicochemical and functional properties
The optical, and electrophysical characteristics of hydrogenated silicon oxycarbonitride films synthesized by the plasma enhanced chemical vapor decomposition of the mixtures of 1,1,1,3,3,3-hexamethyldisilazane with oxygen and nitrogen in the temperature range of 373–973 K have been studied. It has been shown that the obtained films are highly transparent (transmittance is ∼92–99%) in the UV, visible, and IR ranges of the spectrum; they have refractive indices in the range of 1.43–2.25, a low reflection coefficient of visible light (nearly 3%), and low dielectric permittivity.
Keywordsthin films hydrogenated silicon oxycarbonitride optical properties dielectric constant
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