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Glass Physics and Chemistry

, Volume 40, Issue 6, pp 643–649 | Cite as

Hydrogenated silicon oxycarbonitride films. Part II. Physicochemical and functional properties

  • N. I. Fainer
  • A. G. Plekhanov
  • Yu. M. Rumyantsev
  • I. V. Yushina
  • V. R. Shayapov
  • V. N. Kichai
Article

Abstract

The optical, and electrophysical characteristics of hydrogenated silicon oxycarbonitride films synthesized by the plasma enhanced chemical vapor decomposition of the mixtures of 1,1,1,3,3,3-hexamethyldisilazane with oxygen and nitrogen in the temperature range of 373–973 K have been studied. It has been shown that the obtained films are highly transparent (transmittance is ∼92–99%) in the UV, visible, and IR ranges of the spectrum; they have refractive indices in the range of 1.43–2.25, a low reflection coefficient of visible light (nearly 3%), and low dielectric permittivity.

Keywords

thin films hydrogenated silicon oxycarbonitride optical properties dielectric constant 

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Copyright information

© Pleiades Publishing, Ltd. 2014

Authors and Affiliations

  • N. I. Fainer
    • 1
  • A. G. Plekhanov
    • 1
  • Yu. M. Rumyantsev
    • 1
  • I. V. Yushina
    • 1
  • V. R. Shayapov
    • 1
  • V. N. Kichai
    • 1
  1. 1.Nikolaev Institute of Inorganic ChemistryRussian Academy of SciencesNovosibirskRussia

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