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A CVD Diamond-Based Photodetector for the Visible and Near-IR Spectral Range

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Abstract

A photodetector for the visible and near-IR spectral range has been created on the basis of a chemical- vapor-deposited diamond modulation-doped with boron. The detected electromagnetic radiation is absorbed in a thin Cr (7 nm)–Au (5.5 nm) bimetallic sublayer deposited on the surface of a modulationdoped diamond film comprising a highly doped (up to 5 × 1019 cm–3) 3-nm-thick delta-layer, low-doped (~1017 cm–3) 800-nm-thick sublayer, and highly doped (1020 cm–3) ~10-μm-thick sublayer with an ohmic Ti(50 nm)/Pt(15 nm)/Au(30 nm) contact. Holes generated in the bimetallic sublayer diffuse into diamond and are accelerated by an electric field in the low-doped sublayer to form a response photocurrent. The ampere/watt responsivity of the photodetector reaches 1 μA/W at a radiation wavelength of 445 nm and 0.18 μA/W at 1.06 μm.

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Correspondence to V. A. Kukushkin.

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Original Russian Text © V.A. Kukushkin, D.B. Radischev, M.A. Lobaev, S.A. Bogdanov, A.V. Zdoroveischev, I.I. Chunin, 2017, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2017, Vol. 43, No. 24, pp. 65–71.

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Kukushkin, V.A., Radischev, D.B., Lobaev, M.A. et al. A CVD Diamond-Based Photodetector for the Visible and Near-IR Spectral Range. Tech. Phys. Lett. 43, 1121–1123 (2017). https://doi.org/10.1134/S1063785017120215

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  • DOI: https://doi.org/10.1134/S1063785017120215

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