Skip to main content
Log in

Properties of ZnSe/Al2O3 Nanostructures Obtained by RF Magnetron Sputtering

  • PHYSICS OF NANOSTRUCTURES
  • Published:
Technical Physics Aims and scope Submit manuscript

Abstract

Experimental data for the synthesis of ZnSe/Al2O3 nanostructures utilizing a technology widely used in integrated circuit (IC) production are reported. It has been shown that the refractive index and size of the coherent scattering domains grow, whereas the energy bandgap decreases, with an increase in ZnSe width. It has been supposed that samples with a ZnSe width of 9 Å contain a ZnSeO3 compound and/or ZnSe ⋅ Al2O3 complex compound. Multilayer heterostructures with a ZnSe width more than 9 Å contain cubic ZnSe nanocrystallites.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1.
Fig. 2.
Fig. 3.

Similar content being viewed by others

REFERENCES

  1. M. B. Muradov, G. M. Eivazova, and Ya. M. Elchiev, Prikl. Fiz., No. 5, 94 (2010).

  2. V. N. Serova, Vestn. Kazan. Tekhnol. Univ., No. 9, 221 (2010).

  3. C. P. Poole and F. J. Owens, Introduction to Nanotechnology (Wiley, 2003).

    Google Scholar 

  4. A. I. Gusev, Nanomaterials, Nanostructures, Nanotechnology (Fizmatlit, Moscow, 2005).

    Google Scholar 

  5. C. Burda and M. A. El-Sayed, Pure Appl. Chem. 72, 165 (2000).

    Article  Google Scholar 

  6. M. C. Beard, G. M. Turner, and C. A. Schmultenmaer, Nanoletters 2, 983 (2002).

    Article  ADS  Google Scholar 

  7. I. V. Zolotukhin, Yu. E. Kalinin, and A. V. Sitnikov, Priroda, No. 1, 11 (2006).

    Google Scholar 

  8. I. A. Akimov, I. Yu. Denisyuk, and I. A. Meshkov, Opt. Spektrosk. 72, 1026 (1992).

    Google Scholar 

  9. M. B. Muratov and A. A. Agasiev, Pis’ma Zh. Tekh. Fiz. 17 (13), 54 (1991).

    Google Scholar 

  10. S. S. Alalykin, R. M. Zakirova, V. F. Kobziev, P. N. Krylov, and I. V. Fedotova, Khim. Fiz. Mezoskopiya 17, 360 (2015).

    Google Scholar 

  11. S. S. Alalykin and P. N. Krylov, Prib. Tekh. Eksp., No. 5, 160 (2009).

  12. S. S. Alalykin and P. N. Krylov, Prib. Tekh. Eksp., No. 2, 149 (2005).

  13. V. V. Brus, M. N. Solovan, E. V. Maistruk, I. P. Kozyarskii, P. D. Maryanchuk, K. S. Ulyanytsky, and J. Rappich, Phys. Solid State 56, 1947 (2014).

    Article  Google Scholar 

  14. V. V. Brus, Z. D. Kovalyuk, and P. D. Maryanchuk, Tech. Phys. 57, 1148 (2012).

    Article  Google Scholar 

  15. P. N. Krylov, R. M. Zakirova, V. F. Kobziev, N. V. Kostenkov, I. V. Fedotova, R. R. Khamidullin, and A. A. Dedyukhin, Tech. Phys. 61, 1027 (2016).

    Article  Google Scholar 

  16. R. V. Kudryavtseva, D. A. Pavlov, and P. A. Shilyaev, Geometric Theory of Scattering of Accelerated Electrons by Crystals (Nizhny Novgorod, 2003).

    Google Scholar 

  17. O. S. Plyashechnik, Candidate’s Dissertation in Mathematics and Physics (Lebedev Physical Inst., Moscow, 2013).

  18. E. A. Romanov, Candidate’s Dissertation in Mathematics and Physics (Udmurt State Univ., Izhevsk, 2011).

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to M. M. Ivanov.

Additional information

Translated by V. Isaakyan

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Ivanov, M.M., Zakirova, R.M., Kobziev, V.F. et al. Properties of ZnSe/Al2O3 Nanostructures Obtained by RF Magnetron Sputtering. Tech. Phys. 63, 1504–1506 (2018). https://doi.org/10.1134/S1063784218100134

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063784218100134

Keywords

Navigation