Structural Characteristics of Sr0.61Ba0.39Nb2O6/MgO(001) Thin Films Grown by RF-Cathode Sputtering

Abstract

Thin films of congruent composition of the system of solid solutions of barium-strontium niobates Sr0.61Ba0.39Nb2O6 (SBN:61) with thicknesses from 30 to 630 nm on a MgO(001) substrate are deposited by RF-cathode sputtering in an oxygen atmosphere. According to the data of X-ray diffraction analysis, it is found that the films are free of impurity and monocrystalline. The deformations of the unit cells in the conjugation plane are practically absent in the films, and the tensile deformations are observed in the direction normal to the surface, which increase with decreasing film thickness. Dielectric measurements indicate high controllability in films.

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Funding

The study was carried out as part of the state assignment of the Southern Scientific Center of Russian Academy of Sciences (topic state registration no. 01201354247) and the grant of the President of the Russian Federation no. MK-678.2020.2

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Correspondence to A. V. Pavlenko.

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Translated by S. Rostovtseva

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Pavlenko, A.V., Stryukov, D.V., Ivleva, L.I. et al. Structural Characteristics of Sr0.61Ba0.39Nb2O6/MgO(001) Thin Films Grown by RF-Cathode Sputtering. Phys. Solid State 63, 286–290 (2021). https://doi.org/10.1134/S1063783421020219

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Keywords:

  • thin films
  • barium-strontium niobate
  • SBN
  • deformation of unit cell