Abstract
The process of obtaining a modified structure for quantum cascade lasers is studied; this process includes growth using molecular-beam epitaxy, plasma etching, photolithography with the use of liquid etching, and the formation of special contacts for decreasing losses in the waveguide. The use of a special type of structure makes it possible, even without postgrowth overgrowth with a high-resistivity material, to attain parameters satisfying requirements to heterostructures in high-quality quantum cascade lasers at maximal simplification of the entire preparation process.
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Original Russian Text © V.V. Mamutin, N.A. Maleev, A.P. Vasilyev, N.D. Ilyinskaya, Yu.M. Zadiranov, A.A. Usikova, M.A. Yagovkina, Yu.M. Shernyakov, V.M. Ustinov, 2018, published in Fizika i Tekhnika Poluprovodnikov, 2018, Vol. 52, No. 1, pp. 133–137.
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Mamutin, V.V., Maleev, N.A., Vasilyev, A.P. et al. Investigation of the Modified Structure of a Quantum Cascade Laser. Semiconductors 52, 126–130 (2018). https://doi.org/10.1134/S106378261801013X
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DOI: https://doi.org/10.1134/S106378261801013X