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Semiconductors

, Volume 52, Issue 1, pp 126–130 | Cite as

Investigation of the Modified Structure of a Quantum Cascade Laser

  • V. V. Mamutin
  • N. A. Maleev
  • A. P. Vasilyev
  • N. D. Ilyinskaya
  • Yu. M. Zadiranov
  • A. A. Usikova
  • M. A. Yagovkina
  • Yu. M. Shernyakov
  • V. M. Ustinov
Fabrication, Treatment, and Testing of Materials and Structures

Abstract

The process of obtaining a modified structure for quantum cascade lasers is studied; this process includes growth using molecular-beam epitaxy, plasma etching, photolithography with the use of liquid etching, and the formation of special contacts for decreasing losses in the waveguide. The use of a special type of structure makes it possible, even without postgrowth overgrowth with a high-resistivity material, to attain parameters satisfying requirements to heterostructures in high-quality quantum cascade lasers at maximal simplification of the entire preparation process.

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References

  1. 1.
    V. V. Mamutin, V. M. Ustinov, J. Boetthcher, and H. Kuenzel, Semiconductors 44, 962 (2010).ADSCrossRefGoogle Scholar
  2. 2.
    V. V. Mamutin, V. M. Ustinov, N. D. Ilyinskaya, M. V. Baydakova, B. Y. Ber, and D. Y. Kasantsev, J. Phys.: Conf. Ser. 291, 012008 (2011).Google Scholar
  3. 3.
    A. Tsekoun, R. Go, M. Pushkarsky, M. Razeghi, and C. K. N. Patel, Proc. Natl. Acad. Sci. 103, 4831 (2006).ADSCrossRefGoogle Scholar
  4. 4.
    M. Razeghi, S. Slivken, Y. Bai, B. Gokden, and S. R. Darvish, New J. Phys. 11, 125017 (2009).ADSCrossRefGoogle Scholar
  5. 5.
    V. V. Mamutin, N. D. Ilyinskaya, B. V. Pushnyi, R. V. Levin, and D. A. Bedarev, Semiconductors 48, 1103 (2014).ADSCrossRefGoogle Scholar
  6. 6.
    R. M. Briggs, C. Frez, C. F. Borgentum, and S. Forouhar, Appl. Phys. Lett. 105, 141117 (2014).ADSCrossRefGoogle Scholar
  7. 7.
    D. Hofstetter, M. Beck, T. Aellen, and J. Faist, Appl. Phys. Lett. 78, 396 (2001).ADSCrossRefGoogle Scholar
  8. 8.
    C. Gmachl, F. Capasso, D. L. Sivco, and A. Y. Cho, Rep. Prog. Phys. 64, 1533 (2001).ADSCrossRefGoogle Scholar
  9. 9.
    A. V. Babichev, A. Bousseksou, N. A. Pikhtin, I. S. Tarasov, E. V. Nikitina, A. N. Sofronov, D. A. Firsov, L. E. Vorobjev, I. I. Novikov, L. Ya. Karachinsky, and A. Yu. Egorov, Semiconductors 50, 1299 (2016).ADSCrossRefGoogle Scholar

Copyright information

© Pleiades Publishing, Ltd. 2018

Authors and Affiliations

  • V. V. Mamutin
    • 1
  • N. A. Maleev
    • 1
  • A. P. Vasilyev
    • 1
  • N. D. Ilyinskaya
    • 1
  • Yu. M. Zadiranov
    • 1
  • A. A. Usikova
    • 1
  • M. A. Yagovkina
    • 1
  • Yu. M. Shernyakov
    • 1
  • V. M. Ustinov
    • 1
  1. 1.Ioffe InstituteSt. PetersburgRussia

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