Corpuscular Diagnosis of the Plasma of Penning Ion Sources
- 1 Downloads
The results of the studies of the energy distribution and atomic-molecular composition of the ions emitted from two Penning ion sources are presented. The transitions between different discharge modes, when the operating pressure and voltage on the anode are changed, are investigated. The energy spectra and mass-charge spectra are measured and the dependences of the fraction of atomic ions on the discharge parameters are determined.
Keywordsion source Penning discharge corpuscular diagnostics energy analysis mass analysis
Unable to display preview. Download preview PDF.