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Crystallography Reports

, Volume 63, Issue 2, pp 241–244 | Cite as

Electron Energy-Loss Spectroscopy Study of the Change in the Free-Electron Density in Thin Superconducting NbN Films under Ion-Beam Irradiation

  • K. E. Prikhodko
  • M. M. Dementyeva
  • B. A. Gurovich
  • D. A. Komarov
  • L. V. Kutuzov
Surface and Thin Films

Abstract

The change in the free-electron density in ultrathin (5 nm) superconducting NbN films in the initial state and after irradiation by O+ ions to doses of (0.1–0.9) × 1017 cm–2 has been studied by electron energy-loss spectroscopy (EELS). The analysis has been performed on cross section samples prepared by the focused ion beam method, using plasmon oscillations with energies up to 50 eV. The radiation-induced replacement of nitrogen atoms with oxygen atoms in niobium nitride is found to change the electrical properties of the material, which leads to a decrease in the free-electron density with an increase in the irradiation dose.

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Copyright information

© Pleiades Publishing, Inc. 2018

Authors and Affiliations

  • K. E. Prikhodko
    • 1
    • 2
  • M. M. Dementyeva
    • 1
  • B. A. Gurovich
    • 1
  • D. A. Komarov
    • 1
  • L. V. Kutuzov
    • 1
  1. 1.National Research Centre “Kurchatov Institute,”MoscowRussia
  2. 2.National Research Nuclear University MEPhI (Moscow Engineering Physics Institute)MoscowRussia

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