Principles of the Construction and Computer Simulation of a Source of Homogeneous and Heterogeneous Cluster Ions
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Abstract
The principles of constructing a sputtering-type high-current source of homogeneous and heterogeneous cluster ions are comprehensively analyzed. The results of analysis are used to perform computer simulation of the given source. The ion-optical scheme and structural model of a new cluster ion source are developed.
Keywords
cluster ion source ion sputtering cascade amplification of cluster ion currentsPreview
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