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Principles of the Construction and Computer Simulation of a Source of Homogeneous and Heterogeneous Cluster Ions

  • S. F. Belykh
  • A. D. Bekkerman
  • A. B. Tolstogouzov
  • A. A. Lozovan
  • D. J. Fu
Article
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Abstract

The principles of constructing a sputtering-type high-current source of homogeneous and heterogeneous cluster ions are comprehensively analyzed. The results of analysis are used to perform computer simulation of the given source. The ion-optical scheme and structural model of a new cluster ion source are developed.

Keywords

cluster ion source ion sputtering cascade amplification of cluster ion currents 

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Copyright information

© Pleiades Publishing, Ltd. 2018

Authors and Affiliations

  • S. F. Belykh
    • 1
  • A. D. Bekkerman
    • 2
  • A. B. Tolstogouzov
    • 3
    • 4
  • A. A. Lozovan
    • 1
  • D. J. Fu
    • 5
  1. 1.Moscow Aviation Institute (National Research University)MoscowRussia
  2. 2.Schulich Faculty of ChemistryTechnion‒Israel Institute of TechnologyHaifaIsrael
  3. 3.Centre for Physics and Technological Research, Dept. de Física da Faculdade de Ciências e TecnologiaUniversidade Nova de LisboaCaparicaPortugal
  4. 4.Ryazan State Radio Engineering UniversityRyazanRussia
  5. 5.Key Laboratory of Artificial Micro- and Nano-Materials of the Ministry of Education, School of Physics and TechnologyWuhan UniversityWuhanChina

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