Abstract
Atom probe tomography is a modern and dynamically developing method of material investigation. It allows studies of the structure of matter at the atomic scale. The physical fundamentals of this method require a specific size, shape and conductivity type of the sample. To expand the analytical capabilities of atom probe tomography, a technique for preparing samples using a focused ion beam in a scanning electron microscope is studied and implemented in this work. The basic principles of this approach are demonstrated; its advantages, disadvantages and important practical aspects are described. To protect a fabricated sample from the influence of environment upon its transport to an atom probe tomograph, it is suggested a platinum coating be used. The atom-probe-tomography analysis of samples prepared with a focused ion beam is carried out. The effects of using such a sample preparation technique are studied.
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Original Russian Text © V.V. Khoroshilov, O.A. Korchuganova, A.A. Lukyanchuk, O.A. Raznitsyn, A.A. Aleev, S.V. Rogozhkin, 2018, published in Poverkhnost’, 2018, No. 1, pp. 101–108.
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Khoroshilov, V.V., Korchuganova, O.A., Lukyanchuk, A.A. et al. On the Precision Preparation of Samples for Atom Probe Tomography Using a Focused Ion Beam in a SEM. J. Surf. Investig. 12, 87–93 (2018). https://doi.org/10.1134/S1027451017060106
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DOI: https://doi.org/10.1134/S1027451017060106