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Physicochemical Properties and Structure of SiCxNy:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane

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Abstract

Raman spectroscopy, high-resolution transmission electron microscopy (HRTEM), and EXAFS spectroscopy are used to study the composition and structure of SiCxNy:Fe films obtained by chemical vapor deposition (CVD) in the Fe–Si–C–N–H system from a mixture of hydrogen, ferrocene (C5H5)2Fe, and organosilicon compound 1,1,3,3,5,5–hexamethylcyclotrisilazane (HMCTS) C6H21N3Si3. The films are deposited under low pressures (LPCVD) at 1123–1273 K, and their phase composition at 300–1300 K is predicted using thermodynamic modeling. The obtained films are nanocomposites with amorphous matrices containing α-Fe crystallites and carbon clusters with a size of 5–10 nm.

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Authors and Affiliations

  1. Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia

    N. I. Fainer, R. V. Pushkarev, S. B. Ehrenburg, S. V. Trubina, V. A. Shestakov & I. S. Merenkov

  2. IMRAM, Tohoku University, Sendai, Japan

    M. Terauchi

Authors
  1. N. I. Fainer
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  2. R. V. Pushkarev
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  3. S. B. Ehrenburg
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  4. S. V. Trubina
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  5. V. A. Shestakov
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  6. I. S. Merenkov
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  7. M. Terauchi
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Correspondence to N. I. Fainer.

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Original Russian Text © 2018 N. I. Fainer, R. V. Pushkarev, S. B. Ehrenburg, S. V. Trubina, V. A. Shestakov, I. S. Merenkov, M. Terauchi.

Translated from Zhurnal Strukturnoi Khimii, Vol. 59, No. 7, pp. 1648–1655, September-October, 2018.

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Fainer, N.I., Pushkarev, R.V., Ehrenburg, S.B. et al. Physicochemical Properties and Structure of SiCxNy:Fe Films Grown From a Gas Mixture of Ferrocene, Hydrogen and 1,1,3,3,5,5-Hexamethylcyclotrisilazane. J Struct Chem 59, 1588–1595 (2018). https://doi.org/10.1134/S0022476618070107

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  • DOI: https://doi.org/10.1134/S0022476618070107

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