Abstract
Processes occurring at nanostructuring of glass irradiated by tightly focused single femtosecond laser pulses with selective chemical etching in the alkaline solution have been studied. Structures with a width up to 50 nm have been created. The dependence of the morphology and sizes of the created structures on the parameters of laser radiation and etching time has been revealed. Measurements of fluorescence of glass at the variation of the polarization and energy of a laser pulse in wide ranges have revealed the character of nonlinear absorption processes in a sample. The results have clarified the physicochemical processes in glass leading to selective chemical etching and demonstrate advantages of this method over the method of simple laser processing of glass for the creation of complex structures with subdiffraction resolution.
Similar content being viewed by others
References
S. Nolte, C. Momma, H. Jacobs, A. Tunnermann, B. N. Chichkov, B. Wellegehausen, and H. Welling, J. Opt. Soc. Am. B 14, 10 (1997).
F. Korte, J. Serbin, J. Koch, A. Egbert, C. Fallnich, A. Ostendorf, and B. N. Chichkov, Appl. Phys. A 77, 2 (2003).
R. R. Gattass and E. Mazur, Nat. Photon. 2, 4 (2008).
J. Krüger and W. Kautek, in Polymers and Light, Ed. by T. K. Lippert (Springer, Berlin, Heidelberg, 2004), Vol. 168, p. 247.
C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D.M. Rayner, V. R. Bhardwaj, and P. B. Corkum, Appl. Phys. A 84, 1 (2006).
S. Kiyama, S. Matsuo, S. Hashimoto, and Y. Morihira, J. Phys. Chem. C 113, 27 (2009).
Y. Bellouard, A. Said, M. Dugan, and P. Bado, Opt. Express 12, 10 (2004).
J. Song, J. Lin, J. Tang, Y. Liao, F. He, Z. Wang, L. Qiao, K. Sugioka, and Y. Cheng, Opt. Express 22, 12 (2014).
A. P. Joglekar, H.-H. Liu, E. Meyhöfer, G. Mourou, and A. J. Hunt, Proc. Natl. Acad. Sci. 101, 16 (2004).
A. Shakhov, A. Astafiev, A. Gulin, and V. Nadtochenko, ACS Appl. Mater. Interfaces 7, 49 (2015).
A. Vogel, J. Noack, G. Hüttman, and G. Paltauf, Appl. Phys. B 81, 8 (2005).
V. V. Temnov, K. Sokolowski-Tinten, P. Zhou, A. El-Khamhawy, and D. von der Linde, Phys. Rev. Lett. 97, 23 (2006).
B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. Lett. 74, 12 (1995).
H. Varel, D. Ashkenasi, A. Rosenfeld, R. Herrmann, F. Noack, and E. E. B. Campbell, Appl. Phys. A 62, 3 (1996).
N. Sanner, O. Utéza, B. Bussiere, G. Coustillier, A. Leray, T. Itina, and M. Sentis, Appl. Phys. A 94, 4 (2009).
A. M. Shakhov, A. A. Astafiev, N. N. Denisov, F. E. Gostev, I. V. Shelaev, A. N. Titov, and V. A. Nadtochenko, Quantum Electron. 44, 9 (2014).
L. V. Zhigilei and B. J. Garrison, J. Appl. Phys. 88, 3 (2000).
K. Cvecek, I. Miyamoto, and M. Schmidt, Opt. Express 22, 13 (2014).
H. Haofeng, W. Xiaolei, and Z. Hongchen, J. Phys. D: Appl. Phys. 44, 13 (2011).
Author information
Authors and Affiliations
Corresponding author
Additional information
Russian Text © The Author(s), 2019, published in Pis’ma v Zhurnal Eksperimental’noi i Teoreticheskoi Fiziki, 2019, Vol. 109, No. 5, pp. 294–300.
Rights and permissions
About this article
Cite this article
Shakhov, A.M., Astafiev, A.A. & Nadtochenko, V.A. Physicochemical Mechanisms of Nanostructuring of Glass by Femtosecond Laser Pulses with the Use of Selective Etching. Jetp Lett. 109, 292–297 (2019). https://doi.org/10.1134/S0021364019050138
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S0021364019050138