Multichannel and Multifunctional Frequency-output Sensors of Physical Effects Based on a Universal Field Transistor-type Sensing Element with a Silicon-on-Insulator Structure
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It is shown that by using electric-field-controlled transistor-type sensing elements with a siliconon-insulator structure as a basis it is possible to develop multichannel and multifunctional sensors with a controllable frequency output. The sensitivities of the described frequency-output sensors of the magnetic field and temperature are as high as 2.2 kHz/mT and 1.5 kHz/°C, respectively.
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- 1.Baranochnikov, M.L., Leonov, A.V., Mal’tsev, P.P., Mokrushin, A.D., Mordkovich, B.N., Omel’yanovskaya, N.M., and Pazhin, D.M., Mikrosistemnaya Tekhnika, 2002, no. 10, p.8.Google Scholar
- 2.Akimov, A.G., Barabanenkov, M.Yu., and Mordkovich, V.N., Prib. Tekh. Eksp., 1988, no. 5, p.123.Google Scholar
- 4.Mordkovich, V.N., Materialy Elektronnoi Tekhniki, 1998, no. 2, p.4.Google Scholar
- 5.Sze, S.M., Physics of Semiconductor Devices, 2nd ed., New York: Wiley, 1981.Google Scholar