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Instruments and Experimental Techniques

, Volume 61, Issue 2, pp 299–305 | Cite as

Multichannel and Multifunctional Frequency-output Sensors of Physical Effects Based on a Universal Field Transistor-type Sensing Element with a Silicon-on-Insulator Structure

  • A. V. Leonov
  • A. A. Malykh
  • V. N. Mordkovich
  • M. I. Pavlyuk
Laboratory Techniques
  • 14 Downloads

Abstract

It is shown that by using electric-field-controlled transistor-type sensing elements with a siliconon-insulator structure as a basis it is possible to develop multichannel and multifunctional sensors with a controllable frequency output. The sensitivities of the described frequency-output sensors of the magnetic field and temperature are as high as 2.2 kHz/mT and 1.5 kHz/°C, respectively.

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References

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Copyright information

© Pleiades Publishing, Inc. 2018

Authors and Affiliations

  • A. V. Leonov
    • 1
  • A. A. Malykh
    • 1
  • V. N. Mordkovich
    • 1
  • M. I. Pavlyuk
    • 2
  1. 1.Institute of Microelectronics Technology and High Purity MaterialsRussian Academy of SciencesChernogolovka, Moscow oblastRussia
  2. 2.JSC ICC Milandr, ZelonogradMoscowRussia

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