Multichannel and Multifunctional Frequency-output Sensors of Physical Effects Based on a Universal Field Transistor-type Sensing Element with a Silicon-on-Insulator Structure
It is shown that by using electric-field-controlled transistor-type sensing elements with a siliconon-insulator structure as a basis it is possible to develop multichannel and multifunctional sensors with a controllable frequency output. The sensitivities of the described frequency-output sensors of the magnetic field and temperature are as high as 2.2 kHz/mT and 1.5 kHz/°C, respectively.
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