Abstract
Some features of atmospheric-pressure radiofrequency (13.56 MHz) arc discharge and its use for obtaining bulk samples of isotope-enriched silicon carbide via the reaction between SiF4 and methane in a hydrogen medium have been considered. It has been shown that power in this type of discharge is released mainly in the near-electrode regions. The deposition of silicon and graphite occurs in a layer-by-layer mode, so that the product carbide contains up to 40% free carbon; therefore, the process requires optimization. At the same time, the proposed type of RF arc discharge with the product deposition zone localized at the ends of the electrodes makes it possible to avoid not only additional heating of the reactor space and walls, but also the loss of expensive isotope-enriched silicon fluoride.
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Kut’in, A.M., Polyakov, V.S., and Sennikov, P.G., Abstracts of Papers, V Mezhdunarodnaya konferentsiya “Kremnii 2008” (Silicon’2008 V International Conference), Chernogolovka: Granitsa, 2008, p.178.
Vodopyanov, V.A., Golubev, S.V., Mansfeld, D.A., Sennikov, P.G., and Drozdov, Yu.N., Rev. Sci. Instrum., 2011, vol. 82, p. 063503.
Sennikov, P.G., Golubev, S.V., Kornev, R.A., Mochalov, L.A., Kossiy, I.A., and Davidov, A.M., Proceedings of VIII International Workshop “Microwave Discharges: Fundamentals and Applications, Zvenigorod, September 10–14, 2012, p.243.
Sennikov, P.G., Golubev, S.V., Kornev, R.A., and Mochalov, L.A., High Energy Chem., 2014, vol. 48, no. 1, p.49.
Sennikov, P.G., Golubev, S.V., Shashkin, V.I., Pryakhin, D.A., and Abrosimov, N.V., Perspekt. Mater., Spetsial. Vyp., 2011, no. 10, p.160.
Kornev, R.A., Sennikov, P.G., Konychev, D.A., Potapov, A.M., Chuvilin, D.Yu., Yunin, P.A., Gusev, S.A., and Naumann, M., J. Radioanal. Nucl. Chem., 2016, vol. 309, no. 2, p.833.
Sennikov, P.G., Kornev, R.A., and Shishkin, A.I., Plasma Chem. Plasma Process., 2017, vol. 37, no. 4, p.997.
Spiazzi, G., Buso, S., Citron, M., Corradin, M., and Pierobon, R., IEEE Trans. Power Electron., 2003, vol. 18, no. 6, p. 1249.
Ferroni, L.P., Pezzotti, G., Isshiki, T., and Kleebe, H.J., Acta Mater., 2001, vol. 49, no. 11, p. 2109.
Anya, C.C., J. Mater. Sci., 1999, vol. 34, no. 22, p. 5557.
Baron, B., Kumar, C. S., Le Gonidec, G., and Hampshire, S., J. Eur. Ceram. Soc., 2002, vol. 22, no. 9/10, p. 1543.
Weimer, A.W. and Bordia, R.K., Composites, Part B: Eng., 1999, vol. 30, no. 7, p.647.
Noda, T., Suzuki, H., and Araki, H., Fusion Eng. Des., 1998, vol. 41, p.173.
Raizer, Yu.P., Gas Discharge Physics, Berlin: Springer, 1991.
Yanin, D.V., Kostrov, A.V., Smirnov, A.I., Gushchin, M.E., Korobkov, S.V., Strikovskii, A.V., Gundorin, V.I., Nazarov, V.V., and Starodubtsev, M.V., Tech. Phys., 2012, vol. 57, no. 4, p.468.
Newman, C., Polo, S.R., and Wilson, M.K., Spectrochim. Acta, 1959, vol. 10, p.793.
Bürger, H., Biedermann, S., and Ruoff, A., Spectrochim. Acta, 1971, vol. 27, p. 1687.
D’Eu, J.-F., Demaison, J., and Bürger, H., J. Mol. Spectrosc., 2003, vol. 218, p.12.
Newman, C., Kenneth O’Loane, J., et al, J. Chem. Phys., 1956, vol. 25, no. 5, p.855.
Robiette, A.G. Cartwright, G.J., et al., Mol. Phys., 1971, vol. 20, no. 3, p.541.
Bürger, H. and Schulz, P., J. Mol. Spectrosc., 1987, vol. 125, no. 1, p. 140.
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Original Russian Text © R.A. Kornev, P.G. Sennikov, V.V. Nazarov, A.D. Bulanov, A.M. Potapov, 2018, published in Khimiya Vysokikh Energii, 2018, Vol. 52, No. 2, pp. 171–176.
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Kornev, R.A., Sennikov, P.G., Nazarov, V.V. et al. Synthesis of 28SiC from 28SiF4 and Methane in Radiofrequency (13.56 MHz) Arc Hydrogen Plasma. High Energy Chem 52, 189–193 (2018). https://doi.org/10.1134/S001814391802008X
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DOI: https://doi.org/10.1134/S001814391802008X