Abstract
The modern materials and types of the substrates used for the surface acoustic wave (SAW) devices are considered and their special requirements for the SAW sensors are discussed. A classification of the SAWsensors is given, and the factors of SAWsensors design and materials choice criteria are discussed.
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Original Russian Text © O.L. Balysheva, 2014, published in Datchiki i Sistemy, 2014, No. 2, pp. 23–27.
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Balysheva, O.L. Materials choice criteria for surface acoustic wave sensors. Autom Remote Control 77, 1286–1293 (2016). https://doi.org/10.1134/S0005117916070158
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DOI: https://doi.org/10.1134/S0005117916070158