Abstract
Results are presented of the work in the domain of investigation and production of thin-filmed anisotropic magnetoresistive sensors (AMRSs) of the magnetic field and current on the basis of the single-layer or the double-layer metallic ferromagnetic nanostructure with a thickness of the magnetic film of 12–25 nm. The problems of design of the AMRS structures and their efficiency are considered with the investigation of the basic characteristics and technology of their production.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Kasatkin, S.I., Vasil’eva, N.P., and Murav’ev, A.M., Spintronnye magnitorezistivnye elementy i pribory na ikh osnove (Spintronic Magnetoresistive Elements and Devices on Their Basis), Moscow: Elektroservis, 2005.
Kasatkin, S.I. and Murav’ev, A.M., Thin-Filmed Magnetoresistive Sensors, Elektron. Kompon., 2003, no. 3, pp. 1–4.
Kasatkin, S.I., Murav’ev, A.M., Vasil’eva, N.P., et al., Thin-Filmed Multilayer Sensors of the Magnetic Field on the Basis of the Anisotropic Magnetoresistive Effect, Mikroelektronika, 2000, no. 2, pp. 149–160.
Kasatkin, S.I., Kisileva, I.D., Murav’ev, A.M., et al., Magnetoresistive Sensor, RF Patent 2139602, 2000.
Dyagilev, V.V., Kasatkin, S.I., Murav’ev, A.M., et al., Magnetoresistive Sensor, RF Patent 2279737, 2006.
Dyagilev, V.V., Kasatkin, S.I., Murav’ev, A.M., et al., Single-Layer Anisotropic Magnetoresistive Sensor with Slanting Strips, Mikroelektronika, 2007, no. 2, pp. 87–103.
Amelichev, V.V., Galushkov, A.I., Dyagilev, V.V., et al., Microelectronic Magnetoresistive Technology, Nano- Mikrosis. Tekhn., 2007, no. 3, pp. 24–26.
Author information
Authors and Affiliations
Additional information
Original Russian Text © S.I. Kasatkin, A.M. Murav’ev, N.V. Plotnikova, V.V. Amelichev, A.I. Galushkov, I.A. Gamarts, V.V. Lopatin, A.N. Saurov, 2009, published in Avtomatika i Telemekhanika, 2009, No. 6, pp. 141–152.
This work was supported by the Russian Foundation for Basic Research, project no. 07-07-12064-ofi.
Rights and permissions
About this article
Cite this article
Kasatkin, S.I., Murav’ev, A.M., Plotnikova, N.V. et al. Anisotropic magnetoresistive sensors of the magnetic field and current. Autom Remote Control 70, 1043–1053 (2009). https://doi.org/10.1134/S0005117909060101
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S0005117909060101