Studying the Formation of Antireflection Coatings on Multijunction Solar Cells
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The formation of antireflection coating on multijunction solar cells based on A3B5 semiconductor heterostructures has been studied at the stage of structure surface processing by methods of plasmachemical, wet chemical, and ion-beam etching. A technology of creating antireflection coatings based on TiOx/SiO2 layers is developed. The obtained coatings are characterized by improved adhesion to the surface of heterostructure and reduced reflection coefficient of multijunction solar cells.
Keywords:multijunction solar cell antireflection coating A3B5 heterostructure.
CONFLICT OF INTEREST
The authors declare that they have no conflict of interest.
- 5.H. J. Levinson, Principles of Lithography, 3rd ed. (SPIE, Washington, 2010).Google Scholar
- 6.Yu. A. Konstantinov, in Scientific Research: From Theory to Practice, Proceedings of the 4th International Conference (Interaktiv Plyus, Cheboksary, 2016), p. 198.Google Scholar
- 7.V. M. Andreev, A. V. Malevskaya, N. D. Il’inskaya, and Yu. M. Zadiranov, RF Patent No. 2687501 (2018).Google Scholar