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Technical Physics Letters

, Volume 45, Issue 5, pp 446–449 | Cite as

Features of Pulsed Laser Annealing of BC3 Films on a Sapphire Substrate

  • V. Yu. FominskiEmail author
  • R. I. Romanov
  • A. A. Solov’ev
  • I. S. Vasil’evskii
  • D. A. Safonov
  • A. A. Ivanov
  • P. V. Zinin
  • V. P. Filonenko
Article
  • 5 Downloads

Abstract

The morphology, chemical composition, microstructure, and electrical properties of BC3 thin films subjected to melting by a nanosecond laser pulse are investigated. The original films have been created by pulsed laser codeposition of B and C onto a sapphire substrate at 150 and 350°C. Morphological changes in the films depended on their initial structural state. However, a “frozen” structure of both films after irradiation corresponded to the B-saturated graphite-like phase, the local composition of which varied due to the formation of inclusions of amorphous boron carbide. Before and after irradiation, the films exhibited a slightly decreasing dependence of the surface resistance with increasing temperature from 4.2 to 330 K. After laser irradiation, the films resistance has decreased by a factor of ~2.6.

Notes

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Copyright information

© Pleiades Publishing, Ltd. 2019

Authors and Affiliations

  • V. Yu. Fominski
    • 1
    Email author
  • R. I. Romanov
    • 1
  • A. A. Solov’ev
    • 1
  • I. S. Vasil’evskii
    • 1
  • D. A. Safonov
    • 1
  • A. A. Ivanov
    • 1
  • P. V. Zinin
    • 2
  • V. P. Filonenko
    • 3
  1. 1.National Research Nuclear University MEPhI (Moscow Engineering Physics Institute) MoscowRussia
  2. 2.Scientific and Technological Center of Unique Instrumentation, Russian Academy of SciencesMoscowRussia
  3. 3.Vereshchagin Institute for High Pressure Physics, Russian Academy of SciencesTroitskMoscowRussia

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