Influence of Beryllium Barrier Layers on the Properties of Mo/Si Multilayer Mirrors
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The performance of multilayer Mo/Si mirrors with B4C and Be spacers near a wavelength of 13.5 nm has been studied. It has been shown that four-component Mo/Be/Si/B4C mirrors outperform Mo/Si and Mo/Si/B4C mirrors in reflection coefficient by 2.0 and 1.3%, respectively. In addition, Mo/Si mirrors offer the widest transmission band width at half maximum (Δλ1/2 = 0.535 nm). An explanation for these findings has been given.
This study was supported by the Russian Foundation for Basic Research (grant nos. 18-02-00588, 18-02-00173, 18-32-00173, 19-02-00081, 17-52-150006) and program no. 0035-2018-0011 of the Russian Academy of Sciences.
CONFLICT OF INTEREST
The authors claim that they do not have any conflicts of interest.
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