Technical Physics

, Volume 64, Issue 11, pp 1673–1679 | Cite as

Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range

  • M. M. BaryshevaEmail author
  • S. A. Garakhin
  • S. Yu. Zuev
  • V. N. Polkovnikov
  • N. N. Salashchenko
  • M. V. Svechnikov
  • R. M. Smertin
  • N. I. Chkhalo
  • E. Meltchakov


Broadband Mo/Si and Mo/Be multilayer stack-type mirrors for wavelength intervals of 11.1–13.8, 17–21, and 28–33 nm have been developed and fabricated. Uniform reflection of such structures can be implemented using few corrections of technological process.



This work was supported by the Presidium of the Russian Academy of Sciences (Program “Extreme Optical Fields and Interaction with Matter”) and Russian Foundation for Basic Research (project no. 18-32-00173 (development of the Multifitting software), project no. 17-52-150006 (deposition of experimental samples), and project no. 18-32-00671 (measurement of reflectances at a wavelength of 0.154 nm).


The authors declare that there is no conflict of interest.


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Copyright information

© Pleiades Publishing, Ltd. 2019

Authors and Affiliations

  • M. M. Barysheva
    • 1
    Email author
  • S. A. Garakhin
    • 1
  • S. Yu. Zuev
    • 1
  • V. N. Polkovnikov
    • 1
  • N. N. Salashchenko
    • 1
  • M. V. Svechnikov
    • 1
  • R. M. Smertin
    • 1
  • N. I. Chkhalo
    • 1
  • E. Meltchakov
    • 2
  1. 1.Institute for Physics of Microstructures, Russian Academy of SciencesNizhny NovgorodRussia
  2. 2.Laboratoire Charles Fabry, Institut d’Optique Graduate SchoolPalaiseauFrance

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