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Technical Physics

, Volume 63, Issue 12, pp 1743–1748 | Cite as

Probe Technique for Measuring the Bohm Coefficient, Space-Charge Probe Layer Thickness, and Ion Mass

  • P. E. Masherov
  • V. A. RyabyiEmail author
PLASMA
  • 17 Downloads

Abstract

We propose measuring the Bohm coefficient, thickness of the space-charge probe layer, and ion mass in Maxwellian low-pressure plasma based on the results of standard probe measurements using the Bohm effect, Boltzmann law, and “3/2” law in the case of their validity for the studied plasma. This possibility was implemented by comprehensive probe diagnostics of high-frequency xenon plasma of an induction discharge at a pressure of 2 mTorr. Analysis of the obtained results showed that these laws and the Bohm effect are valid with “engineering” accuracy, which made it possible to find Bohm coefficient CBCyl ≈ 1.23 for a cylindrical probe, which served as the basis of the proposed method.

Notes

REFERENCES

  1. 1.
    V. A. Godyak and V. I. Demidov, J. Phys. D: Appl. Phys. 44, 233001 (2011).ADSCrossRefGoogle Scholar
  2. 2.
    http://www.plasmasensors.com.Google Scholar
  3. 3.
    V. A. Riaby, V. A. Obukhov, and P. E. Masherov, High Voltage Eng. 38, 790 (2012).Google Scholar
  4. 4.
    D. Bohm, in The Characteristics of Electrical Discharges in Magnetic Fields, Ed. by A. Guthrie and R. K. Wakerling (McGraw-Hill, New York, 1949), p. 1.Google Scholar
  5. 5.
    O. V. Kozlov, Electric Probe in Plasma, (Atomizdat, Moscow, 1969), pp. 20–21.Google Scholar
  6. 6.
    P. E. Masherov, V. A. Riaby, and V. A. Godyak, Rev. Sci. Instrum. 87, B926 (2016).Google Scholar
  7. 7.
    V. Godyak, US Patent No. 8444870 (2013).Google Scholar
  8. 8.
    V. A. Godyak, Plasma Sources Sci. Technol. 20, 025004 (2011).ADSCrossRefGoogle Scholar
  9. 9.
    P. E. Masherov, Vestn. Mosk. Aviats. Inst. 23 (2), 42 (2016).Google Scholar
  10. 10.
    V. A. Ryabyi and P. E. Masherov, Izv. Ross. Akad. Nauk. Energ., No. 2, 45 (2016).Google Scholar
  11. 11.
    R. B. Piejak, V. A. Godyak, R. Garner, and B. M. Alexandrovich, J. Appl. Phys. 95, 3785 (2004).ADSCrossRefGoogle Scholar
  12. 12.
    P. E. Masherov and V. A. Riaby, Rev. Sci. Instrum. 87, 086106 (2016).ADSCrossRefGoogle Scholar

Copyright information

© Pleiades Publishing, Ltd. 2018

Authors and Affiliations

  1. 1.Research Institute of Applied Mechanics and ElectrodynamicsMoscowRussia

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