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Semiconductors

, Volume 53, Issue 15, pp 2037–2039 | Cite as

Field-Emission Cathodes Based on Microchannel Plates

  • Z. M. KhamdokhovEmail author
  • Z. Ch. Margushev
  • E. Z. Khamdokhov
  • R. Sh. Teshev
  • M. D. Bavizhev
ELEMENTS OF INTEGRATED ELECTRONICS
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Abstract

The existing methods of fabricating low-field cathodes do not permit the development of device structures that comply with the requirements of developers of systems. In this work, large-area field-emission cathodes with homogeneous emission properties of the working surface and low working voltages (<1 kV) are considered. A Spindt cathode with a number of silicon microtips up to 6000 and a packing density of ~1 × 105 cm–2 is investigated. Titanium nitride and carbon films are deposited onto microtips using the electric-arc method. It is shown that the cathode has low emission homogeneity due to the problem of reproducing microtips of the same shape and size. A cathode based on a microchannel plate with channels 6 μm in diameter, inside which graphite-like nanostructures are formed by the electric-arc method, is fabricated. It is found that an increase in the electron flux in the channels of a microchannel plate can result in a considerable decrease in the operating voltage (<1 kV) and attain high emission homogeneity at the highest admissible output current.

Keywords:

field-emission cathode microchannel plate electric field current gain 

Notes

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Copyright information

© Pleiades Publishing, Ltd. 2019

Authors and Affiliations

  • Z. M. Khamdokhov
    • 1
    Email author
  • Z. Ch. Margushev
    • 1
  • E. Z. Khamdokhov
    • 2
  • R. Sh. Teshev
    • 2
  • M. D. Bavizhev
    • 3
  1. 1.Institute of Informatics and Problems of Regional Management of Caucasus, Russian Academy of SciencesNalchikRussia
  2. 2.Berbekov Kabardino-Balkarian State UniversityNalchikRussia
  3. 3.Scientific-and-Research Center, AO NPP “Radii”MoscowRussia

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