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Semiconductors

, Volume 53, Issue 11, pp 1479–1488 | Cite as

Boson Peak Related to Ga Nanoclusters in AlGaN Layers Grown by Plasma-Assisted Molecular Beam Epitaxy at Ga-Rich Conditions

  • V. Yu. DavydovEmail author
  • V. N. JmerikEmail author
  • E. M. RoginskiiEmail author
  • Yu. E. KitaevEmail author
  • Y. M. BeltukovEmail author
  • M. B. SmirnovEmail author
  • D. V. NechaevEmail author
  • A. N. SmirnovEmail author
  • I. A. EliseyevEmail author
  • P. N. BrunkovEmail author
  • S. V. IvanovEmail author
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Abstract

We report the results of systematic Raman spectroscopy studies of AlxGa1 –xN (x ~ 0.75) layers grown using plasma-assisted molecular beam epitaxy at various stoichiometric conditions and growth fluxes. The high-intensity asymmetric low-frequency peak obeying Bose statistics is discovered in Raman spectra of the layers grown by temperature-modulated epitaxy at strongly Ga-enriched conditions. Theoretical model is developed to explain the origin and the high intensity of the observed low-frequency peak, which is attributed to the presence of excessive metallic gallium in AlGaN layers and can be explained by vibrations of gallium clusters with a diameter of ~1 nm. The nature of the low-frequency peak is similar to that of the boson peak in glasses, which occupies the same frequency range in Raman spectra. We demonstrate the capabilities of Raman spectroscopy as an express and non-destructive technique for optimization of growth conditions of AlGaN layers to achieve simultaneously the atomically-smooth droplet-free surface morphology and the high structural quality.

Keywords:

AlGaN alloys plasma-assisted molecular beam epitaxy Raman spectroscopy nanoclusters boson peak 

Notes

ACKNOWLEDGMENTS

The authors are thankful to R.A. Suris and V.I. Kozub for the fruitful discussions and valuable comments. The work was supported in part by Russian Science Foundation (project no. 19-72-30040) for Raman spectroscopy studies and theoretical analysis.

CONFLICTS OF INTEREST

The authors declare no conflict of interest.

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Copyright information

© Pleiades Publishing, Ltd. 2019

Authors and Affiliations

  1. 1.Ioffe InstituteSt. PetersburgRussia
  2. 2.Saint-Petersburg State UniversitySt. PetersburgRussia

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