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Acoustical Physics

, Volume 65, Issue 3, pp 253–262 | Cite as

Numerical Investigation of Quasi-Lamb Modes in C‑Tilted ZnO/SiC Composite Membrane for High Performance Pressure Micro-Sensor

  • F. LaidoudiEmail author
  • F. Boubenider
  • M. Mebarki
  • F. Medjili
  • F. Bettine
PHYSICAL ACOUSTICS
  • 15 Downloads

Abstract

Using the finite element method, we have studied the Lamb modes characteristics propagation in c‑tilted ZnO/SiC thin film composite membrane. Phase velocity dispersion curves, electromechanical coupling factors and the mass loading effect on the fundamental quasi Lamb modes are theoretically investigated for different rotating angle (0°, θ°, 90°), θ being the angle of rotation, and for different hZnO/λ values. To develop high performance pressure micro-sensor based on thin film piezoelectric ZnO on amorphous SiC (range 0.1 to 100 Pa) the anti-symmetric fundamental qA0 mode phase shift is studied for pressure sensing.

Keywords:

Finite element analysis acoustic quasi-Lamb modes thin piezoelectric films gravimetric measurement pressure sensor 

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Copyright information

© Pleiades Publishing, Ltd. 2019

Authors and Affiliations

  • F. Laidoudi
    • 1
    • 2
    Email author
  • F. Boubenider
    • 1
  • M. Mebarki
    • 1
  • F. Medjili
    • 2
  • F. Bettine
    • 2
  1. 1.Laboratory of Physics of Materials, Team “Waves and Acoustic”, University of Sciences and Technology, (USTHB) B.P.32 El AlliaBab-EzzouarAlgeria
  2. 2.Research Center in Industrial Technologies CRTI, P.O.Box64CheragaAlgeria

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