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Optics and Spectroscopy

, Volume 127, Issue 4, pp 647–655 | Cite as

Investigation of the Possibility of Measuring the Radius of Mirrors with Instruments Equipped with Wavefront Sensors

  • A. A. SakharovEmail author
  • T. S. Piskunov
  • N. V. Baryshnikov
  • I. V. Zhivotovskii
  • E. E. Mukhina
  • M. V. Vyazovykh
HIGH-PRECISION OPTICAL MEASUREMENTS AND METROLOGY
  • 13 Downloads

Abstract

A technique has been developed for measuring the radii of curvature of optical parts. A scheme of the device based on a wavefront sensor is proposed, which is characterized by a minimum measurement error. The theoretical substantiation of the measurement technique is given. A number of methods that make it possible to measure the radii of curvature of optical parts are considered. The reasons for an increase in the measurement error are analyzed. The results of measurements according to the given methodology with an original prototype device are considered.

Keywords:

mirror radius metrology Shack–Hartmann sensor wavefront sensor radius of curvature measurement technique measurement errors Zemax 

Notes

CONFLICT OF INTEREST

The authors declare that they have no conflict of interest.

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Copyright information

© Pleiades Publishing, Ltd. 2019

Authors and Affiliations

  • A. A. Sakharov
    • 1
    Email author
  • T. S. Piskunov
    • 1
  • N. V. Baryshnikov
    • 1
  • I. V. Zhivotovskii
    • 1
  • E. E. Mukhina
    • 1
  • M. V. Vyazovykh
    • 1
  1. 1.Bauman Moscow State Technical UniversityMoscowRussia

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