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Instruments and Experimental Techniques

, Volume 62, Issue 3, pp 421–425 | Cite as

A Simple Microdisplacement Sensor

  • V. A. ZavalishinEmail author
LABORATORY TECHNIQUES
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Abstract—

The design and characteristics of the displacement sensor based on a hysteresis- and friction-free Hall-effect transducer are described. The conversion factor is 40 mV/mm at a supply current of 90 mA. The displacement ranges are within the margins of ±1 mm and ±0.4 mm with a deviation from the linearity of less than 1%. The stiffness is 10 g-force/mm and the achieved resolution is 1.25 nm.

Notes

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Copyright information

© Pleiades Publishing, Ltd. 2019

Authors and Affiliations

  1. 1.Mikheev Institute of Metal Physics, Ural Branch, Russian Academy of SciencesYekaterinburg,  Russia

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