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Inorganic Materials

, Volume 54, Issue 12, pp 1205–1215 | Cite as

Preparation of Graphene on Copper Substrates of Various Geometries by Chemical Vapor Deposition

  • E. V. ZaitsevEmail author
  • G. S. Bocharov
  • P. N. Chuprov
  • S. V. Tkachev
  • D. Yu. Kornilov
  • S. P. Gubin
  • A. V. Eletskii
  • E. S. Kurkina
Article
  • 24 Downloads

Abstract

In this paper, we examine the key features of the preparation of graphene by chemical vapor deposition on copper substrates differing in geometry (foil and wire). Along with graphene, we analyze impurity structures forming on the surface of copper substrates as a result of graphene synthesis and discuss their origin and possible ways of eliminating them.

Keywords:

CVD reactor graphene impurity particles 

Notes

ACKNOWLEDGMENTS

This work was supported by the Russian Federation Ministry of Education and Science, state research target nos. 3.1414.2017/PCh and 3.7131.2017/VU.

We are grateful to O.V. Gradov (Talroze Institute of Energy Problems of Chemical Physics, Russian Academy of Sciences) for helpful discussions of the experimental data and to the personnel of the OOO AkKoLab for the use of their equipment.

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Copyright information

© Pleiades Publishing, Inc. 2018

Authors and Affiliations

  • E. V. Zaitsev
    • 1
    • 2
    Email author
  • G. S. Bocharov
    • 3
  • P. N. Chuprov
    • 1
  • S. V. Tkachev
    • 1
  • D. Yu. Kornilov
    • 1
  • S. P. Gubin
    • 1
    • 4
  • A. V. Eletskii
    • 3
  • E. S. Kurkina
    • 2
  1. 1.OOO AkKoLabMoscowRussia
  2. 2.Mendeleev University of Chemical TechnologyMoscowRussia
  3. 3.Moscow Power Engineering Institute (National Research University)MoscowRussia
  4. 4.Kurnakov Institute of General and Inorganic Chemistry, Russian Academy of SciencesMoscowRussia

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