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A study of the electron energy distribution function in the cylindrical magnetron discharge in argon and xenon

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Czechoslovak Journal of Physics Aims and scope

Abstract

We studied the behaviour of the cylindrical magnetron discharge in argon and xenon. We concentrated ourselves mainly on description of the transport of charge carriers in the region from the negative glow to the anode. We attempted to describe this transport using Monte-Carlo simulations as well as by standard transport parameters, mobility and diffusion coefficients. We also experimentally determined the radial shape of the electron energy distribution function (EEDF) including its detectable anisotropy caused by the presence of magnetic field. For the EEDF determination we used the planar probe whose collecting surface was adjustable at different angles to the direction of the magnetic field as well as movable in radial direction. The results of modelling and experiment are discussed.

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Authors and Affiliations

  1. Institute of Physics, Faculty of Mathematics and Natural Sciences, Ernst-Moritz-Arndt University, Domstrasse 10a, 17 487, Greifswald, Germany

    J. F. Behnke, E. Passoth & C. Csambal

  2. Department of Electronics and Vacuum Physics, Faculty of Mathematics and Physics, Charles University, V Holešovičkách 2, 180 00, Praha 8, Czech Republic

    M. Tichý & P. Kudrna

  3. Department of Physical Electronics, Faculty of Natural Sciences, Masaryk University, Kotlářská 2, 611 37, Brno, Czech Republic

    D. Trunec & A. Brablec

Authors
  1. J. F. Behnke
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  2. E. Passoth
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  3. C. Csambal
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  4. M. Tichý
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  5. P. Kudrna
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  6. D. Trunec
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  7. A. Brablec
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Dedicated to Prof. Jan Janča on the occasion of his 60th birthday.

The work in Germany was financially supported by the Deutsche Forschungsgemeinschaft (DFG) in frame of the project SFB 198 Greifswald “Kinetik partiell ionisierter Plasmen”. The work in Czech Republic was partially financially supported by the Grant Agency of Czech Republic, Grant No. GAČR-202/97/1011, GAČR-202/97/P078 and GAČR-202/98/0116 and by the Grant Agency of Charles University, Grant No. GAUK-181/96 and GAUK-75/98.

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Behnke, J.F., Passoth, E., Csambal, C. et al. A study of the electron energy distribution function in the cylindrical magnetron discharge in argon and xenon. Czech J Phys 49, 483–498 (1999). https://doi.org/10.1023/A:1022816925175

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  • DOI: https://doi.org/10.1023/A:1022816925175

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