Effect of temperature on pull-in voltage and nonlinear vibration behavior of nanoplate-based NEMS under hydrostatic and electrostatic actuations
- 1 Downloads
This paper deals with the study of the temperature effect on the nonlinear vibration behavior of nanoplate-based nano electromechanical systems (NEMS) subjected to hydrostatic and electrostatic actuations. Using Eringen’s nonlocal elasticity and Gurtin—Murdoch theory, the nonlocal plate model is derived through Hamilton’s principle. The governing equation which is extremely nonlinear due to the geometrical nonlinearity and electrostatic attraction forces is solved numerically using the differential quadrature method (DQM). The accuracy of the present method is verified by comparing the obtained results with the experimental data and those in the literature and very good agreement is obtained. Finally a comprehensive study is carried out to determine the influence of temperature on the nonlinear vibration characteristics of NEMS made of two different materials including aluminum (Al) and silicon (Si) and some conclusions are drawn.
KeywordsSmall scale effect Nano electromechanical system Nonlinear vibration Temperature effect Pull-in voltage
Unable to display preview. Download preview PDF.
- 6.A.R. Setoodeh, P. Malekzadeh, A.R. Vosoughi, Nonlinear free vibration of orthotropic graphene sheets using nonlocal Mindlin plate theory, J. Mech. Eng. Sci. 7 (2011) 1896–1906.Google Scholar
- 7.A. Ghorbanpour Arani, R. Kolahchi, A.M. Barzoki, M.R. Mozdianfard, S.M. Noudeh Farahani, Elastic foundation effect on nonlinear thermo-vibration of embedded double-layered orthotropic grapheme sheets using differential quadrature method, J. Mech. Eng. Sci. 227 (4) (2013) 862–879.CrossRefGoogle Scholar
- 15.W.S. Lee, K.C. Kwon, B.K. Kim, J.H. Cho, Frequency-shifting analysis of electrostatic tunable micro-mechanical actuator, J. Model. Simul. Microsyst. 2 (2001) 83–88.Google Scholar
- 17.R. Ansari, M. Mohammadi, M. Faghih Shojaei, R. Gholami, M.A. Darabi, A geometrically non-linear plate model including surface stress effect for the pull-in instability analysis of rectangular nanoplates under hydrostatic and electrostatic actuations, Int. J. Non-Linear Mech. 67 (2014) 16–26.CrossRefGoogle Scholar
- 21.H. Sadeghian, G. Rezazadeh, E. Abbaspour, A. Tahmasebi, I. Hosainzadeh, The effect of residual stress on pull-in voltage of fixed-fixed end type MEM switches with variative electrostatic area, in: Proceedings of the 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Zhuhai, China, 2006 January 18–21.Google Scholar
- 25.S. Talebian, H. Yagubizade, G. Rezazadeh, Mechanical behavior of a rectangular micro plate with hydrostatic and electrostatic pressures actuation, in: Proceedings of the 16th Annual (International) Conference on Mechanical Engineering (ISME 2008), Kerman, Iran, 2008, pp. 14–16.Google Scholar
- 26.G. Rezazadeh, Y. Alizadeh, H. Yagubizade, Effect of residual stress on divergence instability of rectangular microplate subjected to nonlinear electrostatic pressure, J. Sens. Transducers 81 (2007) 1364–1372.Google Scholar
- 32.P. Lancaster, M. Timenetsky, The Theory of Matrices With Applications, 2nd ed., Academic Press, Orlando, 1985.Google Scholar
- 33.O. Francais, I. Dufour, Normalized abacus for the global behavior of diaphragm: pneumatic, electrostatic, piezoelectric or electromagnetic actuation, J. Model. Simul. Microsyst. 2 (1999) 149–160.Google Scholar