Theoretical Investigation on the Dynamic Performance of CMUT for Design Optimization
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Although many modeling approaches exist for analyzing the behavior of capacitive micro-machined ultrasonic transducers (CMUTs), the relation equation between the design parameters with input and output is still lacking. What there is can only be used to analyze the dynamic performance of CMUT indirectly and qualitatively, such as stiffness and sound pressure. A lumped-parameter theoretical model based on the dynamic theory is proposed in this paper. The relation equations between the design parameters with inputs and outputs are given. The results obtained by the proposed model agree well with those by finite element method (FEM) simulation. The dynamic and static behavior of CMUT can be clearly depicted, which is helpful for design and optimization iterations. This shows that the proposed model makes it easier to optimize the parameters of a CMUT with respect to output and bandwidth directly and to better understand the influence of each parameter.
Key wordsCMUT dynamic theory finite element method
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- Haller,M.I. and Khuri-Yakub, B.T., A surface micromachined electrostatic ultrasonic air transducer. In: Proceedings of IEEE Ultrasonics Symposium, 1994: 1241–1244.Google Scholar
- McLean, J. and Degertekin,F., CMUTs with dual electrodes structure for improved transmit and receive performance. In: Proceedings of IEEE Ultrasonics Symposium, 2004: 501–504.Google Scholar
- Bayram,B., Yaralioglu,G., Ergun,G. and Khuri-Yakub,B.T., Influence of the electrode size and location on the performance of a CMUT. In: Proceedings of IEEE Ultrasonics Symposium, 2001: 949–952.Google Scholar
- Bayram,B., Hasggström,E., Ergun,A.S., Yaralioglu,G.G. and Khuri-Yakub,B.T., Dynamic analysis of CMUTs in different regimes of operation. In: Proceeding of IEEE Ultrasonics Symposium, 2003: 481–484.Google Scholar
- Huang,Y., Hæggström,E.O., Zhuang,X., Ergun,A.S. and Khuri-Yakub,B.T., Optimized membrane configuration improves CMUT performance. In: Proceeding of IEEE Ultrasonics Symposium, 2004: 505–508.Google Scholar
- Lohfink,A., Eccardt,P.C., Benecke,W. and Meixner,H., Derivation of a 1D CMUT model from FEM results for linear and nonlinear equivalent circuit simulation. In: Proceedings of IEEE Ultrasonics Symposium, 2003: 465–468.Google Scholar
- Kagan Oguz,H., Olcum,S., Senlik,M.N., Atalar,A. and Koymen,H., A novel wquicalent circuit model for CMUTs. In: Proceedings of IEEE Ultrasonics Symposium, 2009: 2193–2196.Google Scholar
- Rahman,M. and Chowdhury,S., A new deflection shape function for square membrane CMUT design. In: Proceedings of the IEEE Circuits and Systems, 2010: 2019–2022.Google Scholar
- Buhrdorf,A., Ahrens,O. and Binder,J., Capacitive micromachined ultrasonic transducers and their applications. In: Proceedings of IEEE Ultrasonic Symposium, 2001: 933–940.Google Scholar
- Huang, Y., Capacitive Micromachined Ultrasonic Transducers (CMUTs) Built with Wafer-Bonding Technology. Ph.D. dissertation, Stanford University, USA, 2005.Google Scholar