Acta Mechanica Solida Sinica

, Volume 25, Issue 1, pp 73–81 | Cite as

Thermoelastic Damping in a Micro-Beam Resonator Tunable with Piezoelectric Layers

  • Armin Saeedi Vahdat
  • Ghader Rezazadeh
  • Goodarz Ahmadi
Article

Abstract

In this paper, thermoelastic damping (TED) in a micro-beam resonator with a pair of piezoelectric layers bonded on its upper and lower surfaces is investigated. Equation of motion is derived and the thermoelasticity equation is governed using two dimensional non-Fourier heat conduction model based on continuum theory frame. Applying Galerkin discretization method and complex-frequency approach to solve the equations of coupled thermoelasticity, we study TED of a clamped-clamped micro-beam resonator. The presented results demonstrate that thickness of the piezoelectric layers and application of DC voltage to them can affect the TED ratio and the critical thickness value of the resonator.

Key words

MEMS thermoelastic damping piezoelectric resonator non-Fourier heat conduction 

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Copyright information

© The Chinese Society of Theoretical and Applied Mechanics and Technology 2012

Authors and Affiliations

  • Armin Saeedi Vahdat
    • 2
  • Ghader Rezazadeh
    • 1
  • Goodarz Ahmadi
    • 2
  1. 1.Mechanical Engineering DepartmentUrmia UniversityUrmiaIran
  2. 2.Department of Mechanical & Aeronautical EngineeringClarkson UniversityPotsdamUSA

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