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Acta Mechanica Solida Sinica

, Volume 23, Issue 2, pp 135–146 | Cite as

Analytical Solution for Response of Ferroelectric Thin Film to Infrared Radiation

  • Yaochen Li
  • Changjin Yang
Article

Abstract

Micro-bolometer pixel is an essential element in the infrared focal plane array (IRFPA) of infrared detectors. Its response to infrared radiation is analyzed in this paper. The pixel structure is modeled as a composite laminate thin plate whose sides are measured with the thickness from 0.1–1 µm. Its middle ply is a ferroelectric thin film. Its top surface is covered with a gold or platinum infrared absorber, while the bottom surface is deposited with platinum or lanthanum-nickel. Meanwhile both surfaces are a pair of electrodes. The top surface receives infrared radiation pulses successively. For the very tiny micro bolometer pixel, it is assumed that the infrared radiation is uniformly distributed on the plate. Furthermore, as the ratio of the side length to the thickness of the plate is dramatically large, it is assumed that heat transfer only takes place across the thickness of the plate. The thermal-electric-mechanical coupling governing equations are solved in a form of Fourier series. Results of the displacement, temperature variation and electric output signals of the micro bolometer pixel structure under infrared radiation are obtained, analyzed and compared with experimental data.

Key words

ferroelectric thin film micro-bolometer pixel structure composite laminate plate infrared radiation 

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References

  1. [1]
    Liddiard, K.C., Future advances in uncooled IR sensor technology. SPIE, 2000, 4130: 119–127.Google Scholar
  2. [2]
    Kruse, P.W., Thermal imager from military to marketplace. Photonics Spectra, 1995, 229(3): 104–108.Google Scholar
  3. [3]
    Hey, K.A., Deuson, D.V., Liu, T.Y. and Kleinhaus, W.A., Uncooled focal plane array detector development at infrared technology corporations. SPIE, 2003, 5074: 491–499.Google Scholar
  4. [4]
    Noda, M., Inoue, K. and Ogura, M. et al., An uncooled infrared sensor of dielectric bolometer mode using a new detection technique of operation bias voltage. Sensors and Actuators A — Physical, 2002, 97–98: 329–336.CrossRefGoogle Scholar
  5. [5]
    Zhang, B.S., Zhang, T.J., Liu, J.H. and Jiang, J., BST thin films: Research progress and future trends. Materials Review, 2003, 17(7): 39–42 (in Chinese).Google Scholar
  6. [6]
    Kruse, P.W., Design of uncooled infrared imaging arrays. SPIE, 1996, 2746: 34–37.Google Scholar
  7. [7]
    Li, B., Huang, S.S. and Zhang, X., Transient mechanical and electrical properties of uncooled resistive microbolometer focal plane arrays. SPIE, 2004, 5564: 123–132.Google Scholar
  8. [8]
    Lahiry, S., Gupta, V. and Srenivas, K. et al., Dielectric properties of sol-gel derived Barium-strontium titanate thin films. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2000, 47(4): 854–859.CrossRefGoogle Scholar
  9. [9]
    Horikawa, T., Mikami, N. and Makita, T. et al., Dielectric properties of (Ba, Sr)TiO3 thin films deposited by RF sputtering. Japanese Journal of Applied Physics, 1993, 32(9B): 4126–4130.CrossRefGoogle Scholar
  10. [10]
    Bhattacharya, P., Komeda, T. and Nishioka, Y., Comparative study of amorphous and crystalline (Ba, Sr)TiO3 thin films deposited by laser ablation. Japanese Journal of Applied Physics, 1993, 32(9B): 3181–3183.Google Scholar
  11. [11]
    Khilnaney, D., Jain, A., Jalwania, C.R. and Jain, V.K., Uncooled IR-sensor array based on MEMS technology. SPIE, 2003, 5602: 753–760.Google Scholar
  12. [12]
    Polla, D.L., Bande, P.F. and Pham, L., et al., Micromachined infrared detectors based on pyroelectric thin films. SPIE, 1995, 2552: 602–611.Google Scholar
  13. [13]
    Zhang, T.J., Wang, W. and Yang, X.R., Epitaxially grown Ba1xSrxTiO3 thin films by sol-gel techniques and its structuere and properties. Journal of Infrared and Millimeter Waves. 2002, 21(5): 393–396 (in Chinese).Google Scholar
  14. [14]
    Yu, J., Ling, Y.N. and Sun, J.L. et al., Theoretical study of monolithic pyroelectric sensor arrays by thermal diffusion equations. SPIE, 2000, 4086: 696–699.Google Scholar
  15. [15]
    Escriba, C., Campo, E., Estève, D. and Fourniols, J.Y., Complete analytical modeling and analysis of micromachined thermoelectric uncooled IR sensors. Sensors and Actuators A, 2005, 120: 267–276.CrossRefGoogle Scholar
  16. [16]
    Zhang, W.X., Zhong, Z.Y. and Yin, S. et al., Thermodynamic Analysis of UFPA Detector Pixel. Semiconductor Optoelectronics, 2003, 24(3): 168–171 (in Chinese).Google Scholar
  17. [17]
    Tang, J., Chang, J.G., Chu, J.H. and Yu, Q.H., An uncooled (Ba, Sr)TiO3 thin film infrared sensor array suitable for thermal imaging applications. Infrared Technology, 2002, 24(5): 18–21 (in Chinese).Google Scholar
  18. [18]
    Lee, H.J. and Saravanos, D.A., A mixed multi-field finite element formulation for thermo-piezoelectric composite shells. International Journal of Solids and Structures, 2000, 37: 4949–4967.CrossRefGoogle Scholar
  19. [19]
    Lee, H.J. and Saravanos, D.A., Generalized finite element formulation for smart multilayered thermal piezoelectric composite plates. International Journal of Solids and Structures, 1997, 34(26): 3355–3371.CrossRefGoogle Scholar
  20. [20]
    Mitchell, J.A. and Reddy, J.N., A refined hybrid plate theory for composite laminates with piezoelectric laminae. International Journal of Solids and Structures, 1995, 32(16): 2345–2367.CrossRefGoogle Scholar
  21. [21]
    Tzou, H.S. and Howard, R.V., A piezothermoelastic thin shell theory applied to active structures. Journal of vibration and acoustics, 1994, 116: 295–302.CrossRefGoogle Scholar
  22. [22]
    Pei, P.F., Nayfeh, A.H., Oh, K. and Mook, D.T., A refined nonlinear model of composite plates with integrated piezoelectric actuators and sensors. International Journal of Solids and Structures, 1993, 30(12): 1603–1630.CrossRefGoogle Scholar
  23. [23]
    Heyliger, P. and Brooks, S., Free vibration of piezoelectric laminates in cylindrical bending. International Journal of Solids and Structures, 1995, 32(20): 2945–2960.CrossRefGoogle Scholar
  24. [24]
    Heyliger, P. and Saravanos, D.A., Exact free-vibration analysis of laminated plates with embedded piezoelectric layers. Journal of the Acoustical Society of America, 1995, 98(3): 1547–1557.CrossRefGoogle Scholar
  25. [25]
    Batra, R.C. and Liang, X.Q., The vibration of a simply supported rectangular elastic plate due to piezoelectric actuators. International Journal of Solids and Structures, 1996, 33(11): 1597–1618.CrossRefGoogle Scholar
  26. [26]
    Batra, R.C. and Liang, X.Q., The vibration of a rectangular laminated elastic plate with embedded piezoelectric sensors and actuators. Computers and Structures, 1997, 63(2): 203–216.CrossRefGoogle Scholar
  27. [27]
    Lavrik, N.V., Grbovic, D. and Rajic, S. et al., Uncooled infrared imaging using biomaterial micro-cantilever arrays. SPIE, 2006, 6206:62021 K1–K8.Google Scholar

Copyright information

© The Chinese Society of Theoretical and Applied Mechanics and Technology 2010

Authors and Affiliations

  • Yaochen Li
    • 1
  • Changjin Yang
    • 2
  1. 1.School of Aerospace Engineering and Applied MechanicsTongji UniversityShanghaiChina
  2. 2.School of Urban Rail TransportationSoochow UniversitySuzhouChina

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