, Volume 5, Issue 1, pp 99–107 | Cite as

Material removal mechanism of copper chemical mechanical polishing with different particle sizes based on quasi-continuum method

  • Aibin Zhu
  • Dayong He
  • Shengli He
  • Wencheng Luo
Open Access
Research Article


In this paper, the material removal mechanism of copper chemical mechanical polishing was studied by the quasicontinuum method that integrated molecular dynamics and the finite element method. By analyzing the abrasive process of different particle sizes on single crystal copper, we investigated the internal material deformation, the formation of chips, the stress distribution, and the change of cutting force. Results showed that shear band deformation was generated along the cutting direction at approximately 45° inside the workpiece material. The deformation was accompanied by dislocations and sliding phenomena in the shear band region. Smaller abrasive particle size led to poor quality of the workpiece, while a larger particle size led to better quality. However, larger particle size resulted in greater plastic deformation and deeper residual stress inside the workpiece. Size change of abrasive particles had little effect on the tangential cutting force.


chemical mechanical polishing material removal mechanism particle size quasi-continuum single crystal copper 



The authors greatly appreciate the financial support from National Natural Science Foundation of China (No. 51175409).


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© The Author(s) 2016

Open Access: The articles published in this journal are distributed under the terms of the Creative Commons Attribution 4.0 International License (, which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

Authors and Affiliations

  • Aibin Zhu
    • 1
  • Dayong He
    • 1
  • Shengli He
    • 1
  • Wencheng Luo
    • 1
  1. 1.Key Laboratory of Education Ministry for Modern Design and Rotor-Bearing SystemXi’an Jiaotong UniversityXi’anChina

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