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Photonic Sensors

, Volume 9, Issue 4, pp 344–355 | Cite as

Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography

  • Ying SongEmail author
  • BayanheshigEmail author
  • Shuo Li
  • Shan Jiang
  • Wei Wang
Open Access
Regular
  • 106 Downloads

Abstract

To obtain a good interference fringe contrast and high fidelity, an automated beam iterative alignment is achieved in scanning beam interference lithography (SBIL). To solve the problem of alignment failure caused by a large beam angle (or position) overshoot exceeding the detector range while also speeding up the convergence, a weighted iterative algorithm using a weight parameter that is changed linearly piecewise is proposed. The changes in the beam angle and position deviation during the alignment process based on different iterative algorithms are compared by experiment and simulation. The results show that the proposed iterative algorithm can be used to suppress the beam angle (or position) overshoot, avoiding alignment failure caused by over-ranging. In addition, the convergence speed can be effectively increased. The algorithm proposed can optimize the beam alignment process in SBIL.

Keywords

Piecewise linear weighted iterative algorithm beam alignment scanning beam interference lithography (SBIL) overshoot suppression convergence speed 

Notes

Acknowledgment

The authors thank Dr. Wenhao LI, Zhaowu LIU, and Zhihong BAI for their useful suggestion and assistance.

The research was supported by the National Natural Science Foundation of China (NSFC) (Grant No. 61227901) and Jilin Province Science & Technology Development Program Project in China (Grant No. 20190103157JH).

References

  1. [1]
    N. A. Elmahdy, M. S. Esmail, and M. M. El-Okr, “Characterization of a thermal sensor based on one-dimensional photonic crystal with central liquid crystal defect,” Optik, 2018, 170: 444–451.ADSCrossRefGoogle Scholar
  2. [2]
    K. C. Tseng, S. T. Hong, T. H. Lin, T. H. Chuang, and C. C. Fu, “WGP structures patterned by Lloyd′s mirror laser interference lithography system integrate into MEMS physical sensor device,” SPIE, 2016, 9759: 97591E-1–97591E-6.Google Scholar
  3. [3]
    M. C. Gupta, C. Ungaro, J. J. Foler IV, and S. K. Gray, “Optical nanostructures design, fabrication, and application for solar/thermal energy conversion,” Solar Energy, 2018, 165: 100–114.ADSCrossRefGoogle Scholar
  4. [4]
    K. Lee, J. Lee, B. A. Mazor, and S. R. Forrest, “Transforming the cost of solar-to-electrical energy conversion: integrating thin-film GaAs solar cells with non-tracking mini-concentrators,” Light: Science & Applications, 2015, 4: e288-1–e288-7.Google Scholar
  5. [5]
    A. M. Shuty, S. V. Eliseeva, and D. I. Sementsov, “Dynamics of the magnetic nanoparticles lattice in an external magnetic field,” Journal of Magnetism and Magnetic Materials, 2018, 464: 76–90.ADSCrossRefGoogle Scholar
  6. [6]
    M. Gu, X. P. Li, and Y. Y. Gao, “Optical storage arrays: a perspective for future big data storage,” Light: Science & Applications, 2014, 3: e177-1–e177-11.Google Scholar
  7. [7]
    J. Yuan, Y. Y. Xie, Z. X. Geng, C. X. Wang, H. M. Chen, Q. Kan, et al., “Enhanced sensitivity of gold elliptic nanohole array biosensor with the surface plasmon polaritons coupling,” Optical Materials Express, 2015, 5(4): 818–826.ADSCrossRefGoogle Scholar
  8. [8]
    Q. S. Li, L. Cai, Y. H. Ma, J. H. Yang, Y. Yang, Q. J. Meng, et al., “Research progress of biosensors based on long period fiber grating,” Chinese Optics, 2018, 11(3): 476–502.Google Scholar
  9. [9]
    C. H. Liu, M. H. Hong, M. C. Lum, H. Flotow, F. Ghadessy, and J. B. Zhang, “Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching,” Applied Physics A, 2010, 101(2): 237–241.CrossRefGoogle Scholar
  10. [10]
    A. Retolaza, A. Juarros, J. Ramiro, and S. Merino, “Thermal roll to roll nanoimprint lithography for micro pillars fabrication on thermoplastics,” Microelectronic Engineering, 2018, 193: 54–61.CrossRefGoogle Scholar
  11. [11]
    Y. Kanamori, M. Okochi, and K. Hane, “Fabrication of antireflection subwavelength grating at tips of optical fibers using UV nanoimprint lithography,” Optics Express, 2013, 21(1): 322–328.ADSCrossRefGoogle Scholar
  12. [12]
    Y. F. Chen, “Nanofabrication by electron beam lithography and its application: a review,” Microeletronic Engineering, 2015, 135: 57–72.CrossRefGoogle Scholar
  13. [13]
    N. L. Chiromawa and K. Lbrahim, “Fabrication of micro-array of Fresnel rings on Si by electron beam lithography and reactive ion etching,” Applied Physics A, 2016, 122(2): 122–129.CrossRefGoogle Scholar
  14. [14]
    K. L. Jim, C. W. Leung, and H. L. W. Chan, “Photonic crystal cavity embedded barium strontium titanate thin-film rib waveguide prepared by focused ion beam etching,” Thin solid films, 2010, 518(24): e101–e103.Google Scholar
  15. [15]
    J. Liu, T. Jia, K. Zhou, D. Feng, S. Zhang, H. Zhang, et al., “Direct writing of 150 nm gratings and squares on ZnO crystal in water by using 800 nm femtosecond laser,” Optics Express, 2014, 22(26): 32361–32370.ADSCrossRefGoogle Scholar
  16. [16]
    S. M. Jing, X. Y. Zhang, J. F. Liang, C. Chen, Z. M. Zheng, and Y. S. Yu, “Ultrashort fiber Bragg grating written by femtosecond laser and its sensing characteristics,” Chinese Optics, 2017, 10(4): 449–454.CrossRefGoogle Scholar
  17. [17]
    D. X. Liu, H. Xia, Y. L. Sun, Q. D. Chen, and W. F. Dong, “Femtosecond laser direct writing bio-gel template for in situ synthesis of nanoparticles,” Chinese Optics, 2014, 7(4): 608–615.Google Scholar
  18. [18]
    J. Montoya, “Toward nano-accuracy in scanning beam interference lithography,” Ph.D. dissertation, Massachusetts Institute of Technology, Boston, USA, 2006.Google Scholar
  19. [19]
    W. Wei, “Study on beam quality control of the scanning beam interference lithography system,” Ph.D. dissertation, University of Chinese Academy of Sciences, Beijing, China, 2017.Google Scholar
  20. [20]
    P. T. Konkola, C. G. Chen, R. K. Heilmann, and M. L. Schattenburg, “Beam steering system and spatial filtering applied to interference lithography,” Journal Vacuum Science & Technology B, 2000, 18(6): 3282–3286.ADSCrossRefGoogle Scholar
  21. [21]
    C. G. Chen, “Beam alignment and image metrology for scanning beam interference lithography: fabricating gratings with nanometer phase accuracy,” Ph.D. dissertation, Massachusetts Institute of Technology, USA, 2003.Google Scholar
  22. [22]
    W. Wang, Bayanheshig, Y. Song, S. Jiang, and M. Z. Pan, “Beam alignment and convergence analysis of scanning beam interference lithography system,” Chinese Journal of Lasers, 2016, 43(12): 176–183.Google Scholar
  23. [23]
    T. Kanai, A. Suda, S. Bohman, M. Kaku, S. Yamaguchi, and K. Midorikawa, “Pointing stabilization of a high-repetition-rate high power femtosecond laser for intense few-cycle pulse generation,” Applied Physics Letters, 2008, 92(6): 061106-1–061106-3.ADSCrossRefGoogle Scholar
  24. [24]
    A. Stalmashonak, N. Zhavoronkov, I. V. Hertel, S. Vetrov, and K. Schmid, “Spatial control of femtosecond laser system output with submicroradian accuracy,” Applied Optics, 2006, 45(6): 1271–1274.ADSCrossRefGoogle Scholar
  25. [25]
    Y. Song, W. Wang, S. Jiang and N. Zhang. “Weighted iterative algorithm for beam alignment in scanning beam interference lithography,” Applied Optics, 2017, 56(31): 8669–8675.ADSCrossRefGoogle Scholar

Copyright information

© The Author(s) 2019

Open Access This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

Authors and Affiliations

  1. 1.National Engineering Research Centre for Diffraction Gratings Manufacturing and Application, Changchun Institute of Optics, Fine Mechanics and PhysicsChinese Academy of SciencesJilinChina

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