Photonic Sensors

, Volume 9, Issue 4, pp 344–355 | Cite as

Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography

  • Ying SongEmail author
  • BayanheshigEmail author
  • Shuo Li
  • Shan Jiang
  • Wei Wang
Open Access


To obtain a good interference fringe contrast and high fidelity, an automated beam iterative alignment is achieved in scanning beam interference lithography (SBIL). To solve the problem of alignment failure caused by a large beam angle (or position) overshoot exceeding the detector range while also speeding up the convergence, a weighted iterative algorithm using a weight parameter that is changed linearly piecewise is proposed. The changes in the beam angle and position deviation during the alignment process based on different iterative algorithms are compared by experiment and simulation. The results show that the proposed iterative algorithm can be used to suppress the beam angle (or position) overshoot, avoiding alignment failure caused by over-ranging. In addition, the convergence speed can be effectively increased. The algorithm proposed can optimize the beam alignment process in SBIL.


Piecewise linear weighted iterative algorithm beam alignment scanning beam interference lithography (SBIL) overshoot suppression convergence speed 



The authors thank Dr. Wenhao LI, Zhaowu LIU, and Zhihong BAI for their useful suggestion and assistance.

The research was supported by the National Natural Science Foundation of China (NSFC) (Grant No. 61227901) and Jilin Province Science & Technology Development Program Project in China (Grant No. 20190103157JH).


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© The Author(s) 2019

Open Access This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (, which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

Authors and Affiliations

  1. 1.National Engineering Research Centre for Diffraction Gratings Manufacturing and Application, Changchun Institute of Optics, Fine Mechanics and PhysicsChinese Academy of SciencesJilinChina

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