Calibration Method to Eliminate Zeroth Order Effect in Lateral Shearing Interferometry

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Abstract

In this paper, a calibration method is proposed which eliminates the zeroth order effect in lateral shearing interferometry. An analytical expression of the calibration error function is deduced, and the relationship between the phase-restoration error and calibration error is established. The analytical results show that the phase-restoration error introduced by the calibration error is proportional to the phase shifting error and zeroth order effect. The calibration method is verified using simulations and experiments. The simulation results show that the phase-restoration error is approximately proportional to the phase shift error and zeroth order effect, when the phase shifting error is less than 2° and the zeroth order effect is less than 0.2. The experimental result shows that compared with the conventional method with 9-frame interferograms, the calibration method with 5-frame interferograms achieves nearly the same restoration accuracy.

Keywords

Calibration phase measurement phase shifting interferometry 

Notes

Acknowledgment

This work was supported by the National S&T (Science and Technology) Special Program (No. 2009ZX02202005).

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© The Author(s) 2018

Open Access This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/ licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

Authors and Affiliations

  1. 1.State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and PhysicsChinese Academy of SciencesChangchunChina
  2. 2.University of Chinese Academy of SciencesBeijingChina
  3. 3.Jilin UniversityChangchunChina

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