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Photonic Sensors

, Volume 7, Issue 2, pp 171–181 | Cite as

Improving smoothing efficiency of rigid conformal polishing tool using time-dependent smoothing evaluation model

  • Chi Song
  • Xuejun Zhang
  • Xin Zhang
  • Haifei Hu
  • Xuefeng Zeng
Open Access
Regular

Abstract

A rigid conformal (RC) lap can smooth mid-spatial-frequency (MSF) errors, which are naturally smaller than the tool size, while still removing large-scale errors in a short time. However, the RC-lap smoothing efficiency performance is poorer than expected, and existing smoothing models cannot explicitly specify the methods to improve this efficiency. We presented an explicit time-dependent smoothing evaluation model that contained specific smoothing parameters directly derived from the parametric smoothing model and the Preston equation. Based on the time-dependent model, we proposed a strategy to improve the RC-lap smoothing efficiency, which incorporated the theoretical model, tool optimization, and efficiency limit determination. Two sets of smoothing experiments were performed to demonstrate the smoothing efficiency achieved using the time-dependent smoothing model. A high, theory-like tool influence function and a limiting tool speed of 300 RPM were o

Keywords

Optics design and fabrication optics fabrication polishing 

Notes

Acknowledgment

This research is financially supported by the National Natural Science of China (NSFC) (61210015) and Youth Foundation of National Natural Science Foundation (61605202).

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Copyright information

© The Author(s) 2017

Open Access This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

Authors and Affiliations

  • Chi Song
    • 1
    • 3
  • Xuejun Zhang
    • 1
    • 2
  • Xin Zhang
    • 1
    • 2
  • Haifei Hu
    • 1
    • 2
  • Xuefeng Zeng
    • 1
    • 2
  1. 1.Changchun Institute of Optics, Fine Mechanics and PhysicsChinese Academy of SciencesChangchunChina
  2. 2.Key Laboratory of Optical System Advanced Manufacturing TechnologyChinese Academy of SciencesChangchunChina
  3. 3.University of Chinese Academy of SciencesBeijingChina

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