Skip to main content
SpringerLink
Log in

Inkjet Printing of SiO2 Hollow Spheres/Polyimide Hybrid Films for Foldable Low-k ILD

  • Article
  • Published:
Macromolecular Research Aims and scope Submit manuscript

Abstract

We demonstrate inkjet printing as a viable method for flexible interlayer dielectrics (ILDs) films with a low dielectric constant, excellent mechanical characteristics, and thermal properties in foldable organic light emitting diodes (OLEDs). SiO2 hollow spheres (SHSs)/polyimide (PI) hybrid films were printed by SiO2 coated polystyrene (PS) ink and PI ink. The relative permittivity of the hybrid films decreased from 3.45 to 1.87. The thermally stable PI fims maintained their weight below 500 °C from the TGA result. The dielectric constant and current density retained their properties after 50,000 cycles of bending at a 1 mm bend radius. We propose that the inkjet printing of SHSs/PI hybrid films described herein is a promising approach for flexible ILDs in foldable OLEDs.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. A. Dodabalapur, Z. Bao, A. Makhija, J. G. Laquindanum, V. R. Raju, Y. Feng, H. E. Katz, and J. Rogers, Appl. Phys. Lett., 73, 142 (1998).

    Article  CAS  Google Scholar 

  2. H. Sirringhaus, N. Tessler, and R. H. Friend, Science, 280, 1741 (1998).

    Article  CAS  PubMed  Google Scholar 

  3. R. M. A. Dawson, Z. Shen, D. A. Furst, S. Connor, J. Hsu, M. G. Kane, R. G. Stewart, A. Ipri, C. N. King, P. J. Green, R. Y. Flegal, S. Pearson, W. A. Barrow, E. Dickey, K. Ping, C. W. Tang, S. V. Slyke, F. Chen, J. Shi, J. C. Sturm, and M. H. Lu, SID Int. Symp. Digest Tech. Papers, 29, 11 (1998).

    Article  Google Scholar 

  4. J. J. Lih and C. F. Sung, J. Soc. Inf. Disp., 11, 617 (2003).

    Article  Google Scholar 

  5. T. Chuman, S. Ohta, S. Miyaguchi, H. Satoh, T. Tanabe, Y. Okuda, and M. Tsuchida, SID Int. Symp. Digest Tech. Papers, 35, 45 (2004).

    Article  CAS  Google Scholar 

  6. R. D. Miller, Science, 286, 421 (1999).

    Article  CAS  Google Scholar 

  7. M. Morgen, E. T. Ryan, J. H. Zhao, C. Hu, T. H. Cho, and P. S. Ho, Annu. Rev. Mater. Sci., 30, 645 (2000).

    Article  CAS  Google Scholar 

  8. K. Maex, M. R. Baklanov, D. Shamiryan, F. Iacopi, S. H. Brongersma, and Z. S. Yanovitskaya, J. Appl. Phys., 93, 8793 (2003).

    Article  CAS  Google Scholar 

  9. International Technology Roadmap for Semiconductors, Semiconductor industry Association, 2011 Edition, 2011.

  10. M. A. Wolfgang, Curr. Opin. Solid State Mater. Sci., 6, 371 (2002).

    Article  Google Scholar 

  11. M. K. Kim, D. W. Kim, D. W. Shin, S. J. Seo, H. K. Chung, and J. B. Yoo, Phys. Chem. Chem. Phys., 17, 2416 (2015).

    Article  CAS  PubMed  Google Scholar 

  12. N. Kivilcim, T. Seckin, and S. Koytepe, J. Porous Mater., 20, 709 (2013).

    Article  CAS  Google Scholar 

  13. Y.-H. Kim, H.-S. Kim, and S.-K. Kwon, Macromolecules, 38, 7950 (2005).

    Article  CAS  Google Scholar 

  14. D.-J. Liaw, F.-C. Chang, M. Leung, M.-Y. Chou, and K. Muellen, Macromolecules, 38, 4024 (2005).

    Article  CAS  Google Scholar 

  15. N.-H. You, Y. Suzuki, D. Yorifuji, S. Ando, and M. Ueda, Macromolecules, 41, 6361 (2008).

    Article  CAS  Google Scholar 

  16. S. Köytepe, S. Erdoðan, and T. Seçkin, J. Hazard. Mater., 162, 695 (2009).

    Article  CAS  PubMed  Google Scholar 

  17. B. Alici, S. Koytepe, and T. Seckin, Turk. J. Chem., 31, 569 (2007).

    CAS  Google Scholar 

  18. D.-J. Liaw, B.-Y. Liaw, P.-N. Hsu, and C.-Y. Hwang, Chem. Mater., 13, 1811 (2001).

    Article  CAS  Google Scholar 

  19. M. K. Ghosh and K. L. Mittal, in Polyimides: Fundamentals and Applications, Marcel Dekker, New York, 1996, Chap. 2.

    Google Scholar 

  20. R. R. Tummala and E. J. Rymaszewski, in Microelectronics Packaging Handbook, Van Nostrand Reinhold, New York, 1989, Chap. 1.

    Google Scholar 

  21. H. Treichel, G. Ruhl, P. Anamann, and M. Dietlmeier, Microelectr. Eng., 40, 1 (1998).

    Article  CAS  Google Scholar 

  22. S. J. Lee, M. C. Choi, S. S. Park, and C. S. Ha, Macromol. Res., 19, 599 (2011).

    Article  CAS  Google Scholar 

  23. J. Wen and G. L. Wikes, Chem. Mater., 8, 1667 (1996).

    Article  CAS  Google Scholar 

  24. G. Dingemans, C. A. A. van Helvoirt, M. M. Mandoc, M. C. C. van de Sanden, and W. M. M. Kessels, Electrochem. Soc. 1, H1 (2011).

    Google Scholar 

  25. W. J. Lee, M. H. Chun, K. S. Cheong, and S. K. Rha, Solid State Phenom., 124, 247 (2007).

    Article  Google Scholar 

  26. M. J. Tommalieh, A. M. Zihlif, and G. Ragosta, J. Exp. Nanosci., 6, 652 (2011).

    Article  CAS  Google Scholar 

  27. M. K. Kim, D. W. Kim, S. H. Moon, D. W. Shin, T. S. Oh, and J. B. Yoo, Mater. Sci. Eng. B, 217, 7 (2017).

    Article  CAS  Google Scholar 

  28. E. Tekin, P. J. Smith, and U. S. Schubert, Soft Matter, 4, 703 (2008).

    Article  CAS  Google Scholar 

  29. A. Teichler, J. Perelaer, and U. S. Schubert, J. Mater. Chem. C, 1, 1910 (2013).

    Article  CAS  Google Scholar 

  30. Y. J. Oh, J. H. Kim, Y. J. Yoon, H. T. Kim, H. G. Yoon, S. N. Lee, and J. H. Kim, Curr. Appl. Phys., 11, S359 (2011).

    Google Scholar 

  31. M. Barret, S. Sanaur, and P. Collot, Org. Electron., 9, 1093 (2008).

    Article  CAS  Google Scholar 

  32. K. J. Baeg, D. Khim, J. H. Kim, M. Kang, I. K. You, D. Y. Kim, and Y. Y. Noh, Org. Electron., 12, 634 (2011).

    Article  CAS  Google Scholar 

  33. Y. Yoshioka, P. D. Calvert, and G. E. Jabbour, Macromol. Rapid Commun., 26, 238 (2005).

    Article  CAS  Google Scholar 

  34. E. Tekin, E. Holder, D. Kozodaev, and U. S. Schubert, Adv. Funct. Mater., 17, 277 (2007).

    Article  CAS  Google Scholar 

  35. A. Teichler, R. Eckardt, S. Hoeppener, C. Friebe, J. Perelaer, A. Senes, M. Morana, C. J. Brabec, and U. S. Schubert, Adv. Energy Mater., 1, 105 (2011).

    Article  CAS  Google Scholar 

  36. M. Neophytou, W. Cambarau, F. Hermerschmidt, C. Waldauf, C. Christodoulou, R. Pacios, and S. A. Choulis, Microelectron. Eng., 95, 102 (2012).

    Article  CAS  Google Scholar 

  37. J. W. Ottewill and R. H. Pelton, R. Colloid Polym. Sci., 257, 61 (1979).

    Article  Google Scholar 

  38. Y. Lu, J. McLellan, and Y. Xia, Langmuir, 20, 3464 (2004).

    Article  CAS  PubMed  Google Scholar 

  39. T. K. Pradhan and P. K. Panigrahi, Colloids Surf. A, 482, 562 (2015).

    Article  CAS  Google Scholar 

  40. K. Futera, M. Jakubowska, and G. Koziol, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2010, SPIE-IEEE-PSP WILGA Symposium, International Society for Optics and Photonics, Wilga, Poland, 2010, 77451A.

    Google Scholar 

  41. M. S. Hwang, J. H. Kim, H. T. Kim, Y. J. Yoon, S. G. Hyun, J. H. Kim, S. N. Lee, and J. H. Moon, J. Appl. Phys., 108, 102809 (2010).

    Article  CAS  Google Scholar 

  42. A. V. Yakovlev, V. A. Milichko, E. A. Pidko, V. V. Vinogradov, and A. V. Vinogradov, Sci. Rep., 6, 37090 (2016).

    Article  CAS  PubMed  PubMed Central  Google Scholar 

  43. B. D. Hatton, K. Landskron, W. J. Hunks, M. R. Bennett, D. D. Perovic, and G. A. Ozin, Mater. Today, 9 (2006).

    Google Scholar 

  44. H. Treichel, G. Ruhl, P. Ansmann, R. Wurl, Ch. Muller, and M. Dietlmeier, Microelectron. Eng., 40, 1 (1998).

    Article  CAS  Google Scholar 

  45. Y. J. Yoon and B. Kim, in IEEE 9th Topical Meeting on Electrical Performance of Electronic Packaging, The Institute of Electrical and Electronics Engineers, Scottsdale, 2000, p 163.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. SKKU Advanced Institute of Nanotechnology (SAINT) and center for Human Interface Nano Technology (HINT), Sungkyunkwan University, Suwon, 16419, Korea

    Min Kyu Kim & Ji Beom Yoo

  2. Department of Materials Science and Engineering, Yonsei University, Seoul, 03722, Korea

    Sung Hwan Hwang

  3. Nano Convergence Materials Center, Korea Institute of Ceramic Engineering and Technology (KICET), Jinju, 52851, Korea

    Hyun Sung Jung

  4. School of Mechanical and ICT Convergence Engineering, Sunmoon University, Asan, 31460, Korea

    Tae Sik Oh

  5. School of Advanced Materials Science & Engineering, Sungkyunkwan University, Suwon, 16419, Korea

    Jong Hee Kim & Ji Beom Yoo

Authors
  1. Min Kyu Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Sung Hwan Hwang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Hyun Sung Jung
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Tae Sik Oh
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Jong Hee Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Ji Beom Yoo
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Ji Beom Yoo.

Additional information

Acknowledgments: This work was supported by the Human Resources Development program (No. 20144030200580) of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korea government Ministry of Trade, Industry and Energy.

Electronic supplementary material

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Kim, M.K., Hwang, S.H., Jung, H.S. et al. Inkjet Printing of SiO2 Hollow Spheres/Polyimide Hybrid Films for Foldable Low-k ILD. Macromol. Res. 26, 1123–1128 (2018). https://doi.org/10.1007/s13233-019-7001-z

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s13233-019-7001-z

Keywords

Search

Navigation