Chemical–mechanical polishing of the CdTe and ZnxCd1-xTe, CdxHg1-xTe solid solutions single crystals surfaces by iodine-evolving etching compositions based on aqueous solutions of HNO3–HI–ethylene glycol has been investigated. The dependences of the chemical–mechanical polishing rate on the dilution of the base polishing etchant with ethylene glycol have been established. The polished surface condition after chemical–mechanical polishing using metallographic analysis, atomic force microscopy and X-ray microanalysis have been investigated. Using X-ray microanalysis, we have monitored the concentrations of the host elements (Cd, [Cd + Hg], [Zn + Cd] and Te) and possible contamination with chemical compounds present in the etchants and the solutions used to rinse the samples. The polishing etchant compositions and conditions of conducting the process of chemical–mechanical polishing for forming a high-quality polished surface of CdTe, Zn0.04Cd0.96Te and Cd0.2Hg0.8Te crystals have been optimized.
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Amirtharaj PM, Pollak FN (1984) Raman scattering study of the properties and removal of excess Te on CdTe surfaces. Appl Phys Lett 45:789–791. https://doi.org/10.1063/1.95367
Cheng X et al (2007) Effect of surface preparation on the properties of Au/p-Cd1-xZnxTe. Appl Surf Sci 253(20):8404–8407. https://doi.org/10.1016/j.apsusc.2007.04.008
Chukhneko PS (2012) Interaction of undoped and doped CdTe with (NH4)2Cr2O7–HHal–organic acid etching solutions. Yuriy Fedkovich Chernivtsi National University, Chernivtsi
Duff MC et al (2008) Effect of surface preparation technique on the radiation detector performance of CdZnTe. Appl Surf Sci 254(9):2889–2892. https://doi.org/10.1016/j.apsusc.2007.10.064
Hirano R, Kurita H (2005) Bulk growth of CdZnTe/CdTe crystals. In: Capper P (ed) Bulk crystal growth of electronic optical and optoelectronic materials. Wiley, Chichester, pp 241–267
Hnativ II (2007) Interaction of the single crystals of the ZnxCd1-xTe and CdxHg1-xTe solid solutions with H2O2–HBr–solvent etching compositions. I.M. Frantsevich Institute for Materials Science Problem of NAS of Ukraine, Kyiv
Hossain A et al (2014) Novel approach to surface processing for improving the efficiency of CdZnTe detectors. J Electron Mater 43(8):2771–2777. https://doi.org/10.1007/s11664-013-2698-5
Hvozdiyevskyi YeYe et al (2019) Liquid-phase interaction of CdTe, ZnxCd1–xTe (x=0.04; 0.1) and Cd0.2Hg0.8Te with HNO3–HI–C2H4(OH)2 etching compositions [in Ukrainian]. Voprosy Khimii I Khim Tekhnol 6:31–38. https://doi.org/10.32434/0321-4095-2019-127-6-31-38
Ivanits’ka VG et al (2007) Chemical etching of CdTe in aqueous solutions of H2O2-HI-citric acid. J Electron Mater 36(8):1021–1024. https://doi.org/10.1007/s11664-007-0166-9
Ivanits’ka VG et al (2011) Chemical polishing of CdTe and CdZnTe in Iodine-methanol etching solutions. J Electron Mater 40(8):1802–1808. https://doi.org/10.1007/s11664-011-1649-2
Li G et al (2006) Thermal treatment of detector-grade CdZnTe. J Cryst Growth 295(1):31–35. https://doi.org/10.1016/j.jcrysgro.2006.07.016
Moravec P et al (2006) Chemical polishing of CdZnTe substrates fabricated from crystals grown by the vertical-gradient freezing method. J Electron Mater 35:1206–1213. https://doi.org/10.1007/s11664-006-0242-6
Qiang L, Wanqi J (2006) Surface passivation and electrical properties of p-CdZnTe crystal. Semicon Sci Technol 21(1):72–75. https://doi.org/10.1088/0268-1242/21/1/013
Singh RR et al (2008) Studies on surface processing and passivation of p-Hg1-xCdxTe. Semicon Sci Technol 23(1):015016. https://doi.org/10.1088/0268-1242/23/1/015016
Tomashik ZF et al (2009) Chemical–mechanical polishing of CdTe and ZnxCd1-xTe single crystals by H2O2(HNO3)–HBr–organic solvent etchant compositions. J Electron Mater 38(8):1637–1644. https://doi.org/10.1007/s11664-009-0692-8
Xiaoqin W et al (2005) Surface passivation of CdZnTe wafers. Mater Sci Semicond Process 8(6):615–621. https://doi.org/10.1016/j.mssp.2005.11.001
Zheng Q et al (2011) Influence of surface preparation on CdZnTe nuclear radiation detectors. Appl Surf Sci 257(20):8742–8746. https://doi.org/10.1016/j.apsusc.2011.05.098
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Malanych, G.P., Hvozdiyevskyi, Y.Y., Tomashyk, V.M. et al. Formation of the CdTe, Zn0.04Cd0.96Te and Cd0.2Hg0.8Te polished surfaces at the chemical etching by HNO3–HI–ethylene glycol solutions. Appl Nanosci (2021). https://doi.org/10.1007/s13204-021-01720-y
- Cadmium telluride
- Solid solutions
- Chemical–mechanical polishing
- Chemical etchant
- Single crystal