High-Magnification SEM Micrograph of Siloxanes
- 21 Downloads
Scanning Electron Microscopy (SEM) is a powerful and efficient microscopy for the analysis of nanomaterials. Although this imaging technique is common and several standard methods exist for chemical analysis, questions remain about the optimal magnification and voltage to be used. The chemical molecules are relatively sensitive to the electron beam. HMDS is as often as possible utilized for surface treatment at the covering of the photosensitive material on the wafer, and trimethyl silanol is created, together with alkali, by hydrolysis of HMDS. This study specifically represents the best imaging condition to HMDS and reaction products of organosilicons. The greatest challenges of working with organosilicons molecules is imaging and characterizing features on such a small scale by SEM. The results support the conclusion that, contrary to what is usually recommended, it is best to determine the structure of organosilicons molecules without spectroscopy. It has been a convenient method for the emergence of the structure of HMDS and reaction products.
KeywordsSEM Imaging HMDS Siloxanes
Unable to display preview. Download preview PDF.
This work was conducted under the supervision of a Prof. M. Hannig at Clinic of Operative Dentistry, Periodontology and Preventive Dentistry, Saarland.
- 3.Crompton TR (2012) Comprehensive organometallic analysis. Springer Science & Business Media, New YorkGoogle Scholar
- 5.Vansant EF, Van Der Voort P, Vrancken KC (1995), Characterization and chemical modification of the silica surface. Elsevier ScienceGoogle Scholar
- 6.Protasova LV, Grinberg EE, Bessarabov AM, Makarov VV, Polyanskii MA (1991) The mechanism and kinetics of the synthesis of hexamethyldisiloxane. Russ J Phys Chem 65(2):283–28Google Scholar
- 7.Gronheid R, Lithography Department IMEC, Al-Horr R, Dionex Corporation (2005) In-line monitoring of acid and base contaminants at low ppt-levels for 193 nm lithography. SPIEGoogle Scholar
- 8.Dallas AJ, Ding L, Exley J, Joriman J, Zastera D, Corporate Technology, Donaldson Company Inc., Joang B, Parsons J, Seguin K (2005) High Purity Products, Donaldson Company Inc., Removal of low concentrations of acid gases: issues and solutions. SPIEGoogle Scholar
- 10.Reuter R, Rügner K, Ellerweg D, de los Arcos T, von Keudell A, Benedikt J (2011) The role of oxygen and surface reactions in the deposition of silicon oxide like films from HMDSO at atmospheric pressure, submitted to Plasma Processes and PolymersGoogle Scholar
- 14.Nam NS, Tuan LQ, Son LT (2015) Synthesis and characterization of organically modified silica nanoparticles by epoxy resin. J Chem Appl 1(29):71–74Google Scholar
- 17.Nam NS, Khang DN, Tuan LQ, Son LT (2016) Surface modification of silica nanoparticles by hexamethyldisilazane and n-butanol. Int J Env Tech Sci 2:31–37Google Scholar
- 18.Butts M, Cella JA, Wood CD, Gillette G, Kerboua R, Leman J et al (2002) Silicones. In: Mark HF, Kroschwitz JI (eds) Encyclopedia of polymer science and technology. Wiley-Interscience, Hoboken, pp 765–841 https://doi.org/10.1002/0471440264.pst338
- 19.Mojsiewicz-Pieńkowska K, Jamrógiewicz M, Szymkowska K, Krenczkowska D (2016) Direct human contact with siloxanes (silicones)—safety or risk part 1. Characteristics of siloxanes (silicones). Front Pharmacol 30(7):132Google Scholar
- 20.Mojsiewicz-Pieńkowska K, Szymkowska K, Glamowska D, Cal K, Jankowski Z, Jamrógiewicz M et al (2015) Consequences of overcoming the skin barrier by low molecular cyclic and linear methyl siloxanes (silicones). 5th international conference on clinical & experimental dermatology, New Orleans, USA, July 13–15. J Clin Exp Dermatol Res 6:60Google Scholar
- 21.Kurian P, Kasibhatla B, Daum J, Burns CA, Moosa A, Rosenthal KS et al (2003) Synthesis, permeability and biocompatibility of tricomponent membranes containing polyethylene glycol, polydimethylsiloxanes and polypentamethylcyclopentasiloxane domains. Biomaterials 24:3493–3503. https://doi.org/10.1016/S0142-9612(03)00189-3 CrossRefGoogle Scholar
- 22.Clarson SJ (2003) Synthesis and properties of silicones and silicone-modified materials. In: Clarson SJ, Fitzgerald JJ, Owen MJ, Smith SD, Van Dyke ME (eds) Silicones and silicone-modified materials: a concise overview, chap 1. American Chemical Society, Washington, DC, pp 1–10. https://doi.org/10.1021/bk-2003-0838
- 25.Yessi J, Siew CN, Noor AAO (2014) Investigation of CPD and HMDS sample preparation techniques for cervical cells in developing computer-aided screening system based on FE-SEM/EDX. ScientificWorldJournal 289817Google Scholar